Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Martin R. Elliott is active.

Publication


Featured researches published by Martin R. Elliott.


Archive | 2007

System for transporting substrate carriers

Michael R. Rice; Robert B. Lowrance; Martin R. Elliott; Jeffrey C. Hudgens; Eric A. Englhardt


Archive | 2006

Substrate carrier handler that unloads substrate carriers directly from a moving conveyor

Michael R. Rice; Martin R. Elliott; Robert B. Lowrance; Jeffrey C. Hudgens; Eric A. Englhardt


Archive | 2004

Methods and apparatus for transporting substrate carriers

Michael R. Rice; Robert B. Lowrance; Martin R. Elliott; Jeffrey C. Hudgens; Eric A. Englhardt


Archive | 2008

METHOD AND APPARATUS FOR SUPPLYING SUBSTRATES TO A PROCESSING TOOL

Martin R. Elliott; Michael R. Rice; Robert B. Lowrance; Jeffrey C. Hudgens; Eric A. Englhardt


Archive | 2003

Substrate carrier having door latching and substrate clamping mechanisms

Martin R. Elliott; Michael R. Rice; Robert B. Lowrance; Jeffrey C. Hudgens; Eric A. Englhardt


Archive | 2008

Calibration of high speed loader to substrate transport system

Michael R. Rice; Eric A. Englhardt; Robert B. Lowrance; Martin R. Elliott; Jeffrey C. Hudgens; Kirk Van Katwyk; Amit Puri


Archive | 2004

Systems and methods for transferring small lot size substrate carriers between processing tools

Michael R. Rice; Eric A. Englhardt; Vinay Shah; Martin R. Elliott; Robert B. Lowrance; Jeffrey C. Hudgens


Archive | 2005

Methods and apparatus for repositioning support for a substrate carrier

Martin R. Elliott; Michael R. Rice


Archive | 2001

Automatic calibration method for substrate carrier handling robot and jig for performing the method

Jeffrey C. Hudgens; Martin R. Elliott; Kirk Van Katwyk


Archive | 2003

Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing

Martin R. Elliott; Michael R. Rice; Robert B. Lowrance; Jeffrey C. Hudgens; Eric A. Englhardt; Loy Randall Stuart

Collaboration


Dive into the Martin R. Elliott's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge