Robert B. Lowrance | Researchain

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Featured researches published by Robert B. Lowrance.

Archive | 1992

Semiconductor processing system with robotic autoloader and load lock

Dan Maydan; Sasson Somekh; Charles Ryan-Harris; Richard A. Seilheimer; David Cheng; Edward M. Abolnikov; Lance S. Reinke; J. Christopher Moran; Richard M. Catlin; Robert B. Lowrance; Gregory W. Ridgeway

Archive | 2008

Cluster tool architecture for processing a substrate

Tetsuya Ishikawa; Rick J. Roberts; Helen R. Armer; Leon Volfovski; Jay D. Pinson; Michael R. Rice; David H. Quach; Mohsen Salek; Robert B. Lowrance; John A. Backer; William T. Weaver; Charles Carlson; Chongyang Wang; Jeffrey C. Hudgens; Harald Herchen; Brian Lue

Archive | 1998

Two-axis magnetically coupled robot

Robert B. Lowrance

Archive | 2007

System for transporting substrate carriers

Michael R. Rice; Robert B. Lowrance; Martin R. Elliott; Jeffrey C. Hudgens; Eric A. Englhardt

Archive | 1994

Controlled environment enclosure and mechanical interface

Boris Fishkin; Seiji Sato; Robert B. Lowrance

Archive | 1996

Slotted RF coil shield for plasma deposition system

John C. Forster; Aihua Chen; Howard Grunes; Robert B. Lowrance; Ralf Hofmann; Zheng Xu; Fernand Dorleans

Archive | 1997

Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers

William Mcclintock; Robert B. Lowrance; Howard Grunes

Archive | 1997

Two-piece slit valve insert for vacuum processing system

Avi Tepman; Robert B. Lowrance

Archive | 2006

Substrate carrier handler that unloads substrate carriers directly from a moving conveyor

Michael R. Rice; Martin R. Elliott; Robert B. Lowrance; Jeffrey C. Hudgens; Eric A. Englhardt

Archive | 2005

Cartesian robot cluster tool architecture

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Dave Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah

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