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Dive into the research topics where Martin Warth is active.

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Featured researches published by Martin Warth.


international microwave symposium | 2000

Optimized flip-chip interconnect for 38 GHz thin-film microstrip multichip modules

Ngoc-Hoa Huynh; Wolfgang Heinrich; Klaus Hirche; Werner Scholz; Martin Warth; Wolfgang Ehrlinger

Flip-chip interconnects with 80 /spl mu/m bumps are optimized for 38 GHz by means of electromagnetic simulation. Thin-film microstrip is used as transmission-line on the carrier substrate. A compensation structure reduces reflections at the interconnect below -20 dB. Measurements of a passive structure and active chip modules proved the feasibility of this approach.


Archive | 1990

Acceleration and vibration sensor and method of making the same

Jiri Marek; Frank Bantien; Dietmar Haack; Martin Warth


Archive | 1990

Process for structuring a semiconductor body

Jiri Marek; Dietmar Haack; Martin Warth; Frank Bantien; Günther Findler


Archive | 1989

Tapering via prodn. esp. in multilevel circuits - by etching insulation layers with different etch rates

Martin Warth


Archive | 1989

Structuring disc-shaped monocrystalline semiconductor - using photomask for ion-etching of recess(es), orthogonal to semiconductor main surfaces

Dietmar Haack; Martin Warth


Archive | 1991

Crystal-oriented motion sensor and process for manufacturing it

Jiri Marek; Martin Warth; Guenther Dipl Ing Findler; Hans-Peter Trah


Archive | 2001

Optical detector and method to produce an arrangement of a plurality of semiconductor layers

Gerd Muehlnickel; Klaus Hirche; Martin Warth


Archive | 1999

Device for generating an electrical control signal according to the position of a light beam

Albrecht Kuke; Eberhard Moess; Bernhard Schwaderer; Klaus Hirche; Werner Scholz; Martin Warth


Archive | 2005

Optical detector and method of producing an arrangement of multiple semiconductor layers

Gerd Muehlnikel; Klaus Hirche; Martin Warth


Archive | 2001

Optischer Detektor und Verfahren zum Herstellen einer Anordnung mehrerer Halbleiterschichten Optical detector and method of manufacturing an arrangement of several semiconductor layers

Gerd Muehlnikel; Klaus Hirche; Martin Warth

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