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Masaei Suwada

ASM International

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Publication

Featured researches published by Masaei Suwada.

Archive | 1999

Wafer transfer mechanism

Takayuki Yamagishi; Masaei Suwada; Kazunori Furukawara

Archive | 2008

Wafer processing apparatus with wafer alignment device

Masahiro Takizawa; Masaei Suwada; Masayuki Akagawa

Archive | 2007

Position sensor system for substrate transfer robot

Masahiro Takizawa; Masaei Suwada

Archive | 2004

Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections

Takayuki Yamagishi; Masaei Suwada; Takeshi Watanabe

Archive | 2006

Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same

Masahiro Takizawa; Masaei Suwada; Takashi Wada

Archive | 2011

Method for Positioning Wafers in Multiple Wafer Transport

Takayuki Yamagishi; Masaei Suwada; Hiroyuki Tanaka

Archive | 2001

Gas-line system for semiconductor-manufacturing apparatus

Takayuki Yamagishi; Masaei Suwada

Archive | 2003

Semiconductor manufacturing equipment and maintenance method

Takayuki Yamagishi; Takeshi Watanabe; Masaei Suwada

Archive | 2014

Apparatus and method for pre-baking substrate upstream of process chamber

Keisuke Kamata; Hiroyuki Sato; Kazunori Furukawahara; Masaei Suwada; Kenkichi Okubo; Izumi Arai

Archive | 2007

Cluster type semiconductor processing apparatus

Masahiro Takizawa; Masaei Suwada; Takashi Hagino

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Takayuki Yamagishi

ASM International

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Masahiro Takizawa

ASM International

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Takeshi Watanabe

ASM International

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Hiroyuki Tanaka

ASM International

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Hiroyuki Sato

ASM International

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Izumi Arai

ASM International

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Kazunori Furukawahara

ASM International

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Kazunori Furukawara

ASM International

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Keisuke Kamata

ASM International

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Kenkichi Okubo

ASM International

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