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Takayuki Yamagishi

ASM International

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Publication

Featured researches published by Takayuki Yamagishi.

Archive | 1999

Wafer transfer mechanism

Takayuki Yamagishi; Masaei Suwada; Kazunori Furukawara

Archive | 2004

Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections

Takayuki Yamagishi; Masaei Suwada; Takeshi Watanabe

Archive | 2006

Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus

Takayuki Yamagishi; Tamihiro Kobayashi; Akira Watanabe; Kunihiro Kaneuchi

Archive | 2011

HIGH-THROUGHPUT SEMICONDUCTOR-PROCESSING APPARATUS EQUIPPED WITH MULTIPLE DUAL-CHAMBER MODULES

Yukihiro Mori; Takayuki Yamagishi

Archive | 2012

Dual Section Module Having Shared and Unshared Mass Flow Controllers

Takayuki Yamagishi

Archive | 2011

Method for Positioning Wafers in Multiple Wafer Transport

Takayuki Yamagishi; Masaei Suwada; Hiroyuki Tanaka

Archive | 2004

Semiconductor-processing apparatus provided with susceptor and placing block

Akira Shimizu; Hideaki Fukuda; Hiroki Arai; Baiei Kawano; Takayuki Yamagishi

Archive | 2006

Semiconductor processing apparatus with lift pin structure

Kiyoshi Satoh; Takayuki Yamagishi

Archive | 2001

Gas-line system for semiconductor-manufacturing apparatus

Takayuki Yamagishi; Masaei Suwada

Archive | 2005

Semiconductor-manufacturing apparatus equipped with cooling stage and semiconductor-manufacturing method using same

Takayuki Yamagishi; Takeshi Watanabe

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Collaboration

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Masaei Suwada

ASM International

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Takeshi Watanabe

ASM International

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Tamihiro Kobayashi

ASM International

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Akira Watanabe

ASM International

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Kunihiro Kaneuchi

ASM International

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Hideaki Fukuda

ASM International

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Hiroyuki Tanaka

ASM International

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Akira Shimizu

ASM International

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Baiei Kawano

ASM International

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Hiroki Arai

ASM International

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