Masahiro Morisada | Researchain

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Publication

Featured researches published by Masahiro Morisada.

Journal of the Society of Instrument and Control Engineers | 1989

Sliding Mode Control of Discrete Systems

Katsuhisa Furuta; Masahiro Morisada

Archive | 1999

Scanning type exposure apparatus, position control apparatus, and method therefor

Hiroshi Itoh; Masahiro Morisada

Archive | 2006

Anti-vibration technique

Masahiro Morisada

Archive | 2005

Active damping apparatus, exposure apparatus and device manufacturing method

Masahiro Morisada

Archive | 1993

Servo control system for controlling tracking of an optical head on an optical disk

Masahiro Morisada

Archive | 2003

Stage control apparatus, exposure apparatus, and device manufacturing method

Masahiro Morisada

Archive | 1996

Exposure method and apparatus therefore

Masahiro Morisada

Archive | 1994

Device and method comprising a motor and/or a digital signal processor, means for supplying signals of a plurality of channels in serial form, or means for causing an actuator to abut an object

Yoichi Kubota; Naoki Kawamata; Masahiro Morisada; Katsuhiro Fujii; Hiroshi Itoh; Hiroaki Takeishi

Archive | 2003

Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method

Masahiro Morisada

Archive | 2003

Stage alignment apparatus and control method therefor

Masahiro Morisada

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Collaboration

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Hiroshi Itoh

Canon Inc.

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Hiroaki Takeishi

Canon Inc.

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Katsuhiro Fujii

Canon Inc.

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Mikio Sato

Canon Inc.

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Naoki Kawamata

Canon Inc.

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Shinji Shinnaka

Canon Inc.

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Yoichi Kubota

Canon Inc.

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Katsuhisa Furuta

Tokyo Institute of Technology

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