Masahiro Morisada

Sliding Mode Control of Discrete Systems

Scanning type exposure apparatus, position control apparatus, and method therefor

Anti-vibration technique

Active damping apparatus, exposure apparatus and device manufacturing method

Servo control system for controlling tracking of an optical head on an optical disk

Stage control apparatus, exposure apparatus, and device manufacturing method

Exposure method and apparatus therefore

Device and method comprising a motor and/or a digital signal processor, means for supplying signals of a plurality of channels in serial form, or means for causing an actuator to abut an object

Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method

Stage alignment apparatus and control method therefor