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Featured researches published by Masaki Shiozawa.


Applied Optics | 2000

Influence of sodium impurities on ArF excimer-laser-induced absorption in CaF 2 crystals

Norio Komine; Shigeru Sakuma; Masaki Shiozawa; Tsutomu Mizugaki; Eiji Sato

The formation of color centers induced by irradiation with ArF excimer lasers in CaF(2) crystals was found to depend strongly on the sodium impurity concentration. Sodium-related color centers were generated by two-photon absorption because the slope of the induced absorption coefficient just after irradiation started was proportional to the square of the laser fluence. The saturation absorption also depended on laser fluence, and a photobleaching induced absorption phenomenon was observed. We concluded that the saturation absorption level was determined by the equilibrium between two-photon excitation and one-photon reverse reaction.


Archive | 2006

Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing method

Yasuhisa Tani; Masaki Shiozawa


Archive | 2001

Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical member

Masaki Shiozawa


Archive | 2000

Optical member for photolithography and photolithography apparatus

Shigeru Sakuma; Masaki Shiozawa


Archive | 1996

Production of calcium fluoride crystal

Tsutomu Mizugaki; Hidemi Nishikawa; Shigeru Sakuma; Masaki Shiozawa; Shuichi Takano; 繁 佐久間; 正樹 塩澤; 勉 水垣; 秀美 西川; 修一 高野


Archive | 1996

Calcium fluoride crystal and production thereof

Tsutomu Mizugaki; Shigeru Sakuma; Masaki Shiozawa; 繁 佐久間; 正樹 塩澤; 勉 水垣


Archive | 1994

Fluorite for photolithography

Tsutomu Mizugaki; Hidemi Nishikawa; Shigeru Sakuma; Masaki Shiozawa; Shuichi Takano; 繁 佐久間; 正樹 塩澤; 勉 水垣; 秀美 西川; 修一 高野


Archive | 1997

Production of fluorite single crystal

Tsutomu Mizugaki; Hidemi Nishikawa; Shigeru Sakuma; Masaki Shiozawa; Shuichi Takano; 繁 佐久間; 正樹 塩澤; 勉 水垣; 秀美 西川; 修一 高野


Archive | 1997

Method for annealing fluorite single crystal

Tsutomu Mizugaki; Hidemi Nishikawa; Shigeru Sakuma; Masaki Shiozawa; Shuichi Takano; 繁 佐久間; 正樹 塩澤; 勉 水垣; 秀美 西川; 修一 高野


Archive | 2000

Production of calcium fluoride crystal, and lens

Nobuo Adachi; Madoka Oba; Masaki Shiozawa; 正樹 塩澤; まどか 大場; 伸夫 安立

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