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Masamitsu Shirai

Panasonic

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Publication

Featured researches published by Masamitsu Shirai.

Archive | 2001

Pattern forming material and pattern forming method

Takahiro Matsuo; Masayuki Endo; Masamitsu Shirai; Masahiro Tsunooka

Archive | 1992

Method for forming a resist pattern

Masamitsu Shirai; Masahiro Tsunooka; Kanji Nishijima

Archive | 1991

Positive type photosensitive resinous composition

Masamitsu Shirai; Masahiro Tsunooka; Kanji Nishijima; Katsukiyo Ishikawa

Archive | 1996

Patterning material and patterning method

Takahiro Matsuo; Masayuki Endo; Masamitsu Shirai; Masahiro Tsunooka

Archive | 2000

PHOTOPOLYMERIZABLE FLUORENE RESIN COMPOSITION, CURED RESIN AND MANUFACTURING METHOD

Takeshi Fujiki; Masahiro Kadooka; Shinichi Kawasaki; Masamitsu Shirai; Mitsuaki Yamada; 光昭 山田; 真一 川崎; 正充 白井; 剛 藤木; 正弘 角岡

Archive | 2000

RESOLUBLE ACID CROSSLINKING TYPE POLYMER AND PHOTOSENSITIVE RESIN COMPOSITION OBTAINED BY COMBINING THE POLYMER WITH PHOTOACID GENERATOR

Masahiro Kadooka; Masamitsu Shirai; 正充 白井; 正弘 角岡

Archive | 1996

Method for forming resist pattern by irradiating a resist coating on a substrate, contacting the resist with organic solvent vapor and removing the irradiated portion

Masamitsu Shirai; Masahiro Tsunooka; Kanji Nishijima

Archive | 2001

Pattern formation material and method

Shinji Kishimura; Masaru Sasago; Masamitsu Shirai; Masahiro Tsunooka

Archive | 2005

Photosensitive resin composition, photosensitive element using the same, resist pattern forming method, method for manufacturing printed wiring board and method for removing photoset object

Masahiro Miyasaka; Masamitsu Shirai; 昌宏 宮坂; 正充 白井

Archive | 1997

Method for forming pattern and method for processing semiconductor

Masataka Endo; Masahiro Kadooka; Takahiro Matsuo; Masamitsu Shirai; 隆弘 松尾; 正充 白井; 正弘 角岡; 政孝 遠藤

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Collaboration

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Masahiro Tsunooka

Panasonic

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Masayuki Endo

Panasonic

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Takahiro Matsuo

Panasonic

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Makoto Tanaka

Kyushu University

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Masahiro Miyasaka

Hitachi

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Shinichi Kawasaki

Southern California Gas Company

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Hideki Tachi

Osaka Prefecture University

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Masaru Sasago

Osaka Prefecture University

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Masataka Endo

Panasonic

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Mitsuaki Yamada

Osaka City University

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