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Masao Furuya

Tokyo Electron

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Publication

Featured researches published by Masao Furuya.

Archive | 2005

Processing apparatus and processing apparatus maintenance method

Takaaki Hirooka; Masao Furuya; Shohei Tsutsumi

Archive | 2001

Cooling apparatus and plasma processing apparatus having cooling apparatus

Takaaki Hirooka; Masao Furuya

Archive | 2003

Processing device, and processing device maintenance method

Takaaki Hirooka; Masao Furuya; Shohei Tsutsumi

Archive | 2000

Processor and temperature control method therefor

Takaaki Hirooka; Masao Furuya

Archive | 2001

Electrode cooler of processing device

Takaaki Hirooka; Masao Furuya

Archive | 2006

Temperature control method and apparatus, and plasma processing apparatus

Masao Furuya; Koji Ando

Archive | 2008

PLASMA PROCESSING APPARATUS, ELECTRODE TEMPERATURE ADJUSTMENT DEVICE AND ELECTRODE TEMPERATURE ADJUSTMENT METHOD

Masao Furuya

Archive | 1999

Treatment apparatus and temperature control therefor

Masao Furuya; Takaaki Hirooka; 正男 古屋; 隆明 廣岡

Archive | 2000

Cooling device for electrode of treating device

Masao Furuya; Takaaki Hirooka; 正男 古屋; 隆明 廣岡

Archive | 2007

プラズマ処理装置，電極温度調整装置，電極温度調整方法

Masao Furuya; 正男 古屋

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Takaaki Hirooka

Tokyo Electron

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Shohei Tsutsumi

Tokyo Electron

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Koji Ando

Tokyo Electron

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