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Takaaki Hirooka

Tokyo Electron

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Publication

Featured researches published by Takaaki Hirooka.

Archive | 2005

Processing apparatus and processing apparatus maintenance method

Takaaki Hirooka; Masao Furuya; Shohei Tsutsumi

Archive | 2001

Cooling apparatus and plasma processing apparatus having cooling apparatus

Takaaki Hirooka; Masao Furuya

Archive | 2000

Plasma processing device, its maintenance method, and its installation method

Takaaki Hirooka

Archive | 2003

Processing device, and processing device maintenance method

Takaaki Hirooka; Masao Furuya; Shohei Tsutsumi

Archive | 2000

Processor and temperature control method therefor

Takaaki Hirooka; Masao Furuya

Archive | 2006

Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program

Tsuyoshi Moriya; Takaaki Hirooka; Akitaka Shimizu; Satoshi Tanaka

Archive | 2001

Electrode cooler of processing device

Takaaki Hirooka; Masao Furuya

Archive | 1999

Treatment apparatus and temperature control therefor

Masao Furuya; Takaaki Hirooka; 正男 古屋; 隆明 廣岡

Archive | 2000

Cooling device for electrode of treating device

Masao Furuya; Takaaki Hirooka; 正男 古屋; 隆明 廣岡

Archive | 2001

Cart for mounting/demounting wafer transfer robot

Yoshiaki Sasaki; Takaaki Hirooka; Shuji Hagihara

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Collaboration

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Masao Furuya

Tokyo Electron

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Shohei Tsutsumi

Tokyo Electron

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Akitaka Shimizu

Tokyo Electron

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Satoshi Tanaka

Toshiba

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Tsuyoshi Moriya

Hiroshima University

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Eiji Hirose

Tokyo Electron

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Jun Hirose

Tokyo Electron

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Jun Ozawa

Tokyo Electron

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Shuji Hagihara

Tokyo Electron

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Yoshiaki Sasaki

Tokyo Electron

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