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Dive into the research topics where Masao Koshinaka is active.

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Featured researches published by Masao Koshinaka.


Japanese Journal of Applied Physics | 1991

An In-Process X-Ray Measuring System with a Heat-Resistant Filter Transmitting Soft X-Rays for Light Elements

Takehiko Nakahara; Masao Koshinaka; Shinji Badono; Toshimasa Tomoda

We constructed a RHEED-Si (Li) SSD measuring system which has the capability to detect, in-process, characteristic X-rays emitted from light elements such as oxygen. The feature of the system is that the X-ray detecting system uses a heat-resistant filter made of an Al film and a BN film in front of the SSD. The filter transmits soft X-rays and blocks light and heat radiation which emanate from processes and influence the SSD performance. It was demonstrated that the measuring system could detect change in the O-Kα X-ray intensity from a SiO2/Si(100) sample when it was heated to and kept at 500°C.


Archive | 1989

Thin film forming apparatus having a gas flow settling device

Toshiyuki Kobayashi; Masao Koshinaka; Yoshimi Kinoshita; Masao Oda; Kenji Yoshizawa


Archive | 1993

Light transmission type vacuum separating window and soft X-ray transmitting window

Takehiko Nakahara; Masao Koshinaka; Nobuyuki Kosaka


Archive | 1990

Fine-particle measuring apparatus

Masao Koshinaka; Minoru Akiyama; Toshimasa Tomoda


Archive | 1989

System for detecting minute particles on or above a substrate

Masao Koshinaka; Minoru Akiyama; Hitoshi Tanaka; Toshimasa Tomoda


Archive | 2002

Filter circuit with series and parallel elements

Koichiro Misu; Koji Ibata; Kouji Murai; Kenji Yoshida; Kousaku Yamagata; Kenji Itoh; Isao Murase; Masao Koshinaka


Earozoru Kenkyu | 1994

Measurement of Aerosol Particles in a Wide Area by Using the ICCD Camera.

Takeshi Iwamoto; Masao Koshinaka; Nobuyuki Kosaka


Archive | 1993

Strahlungsdurchlaß-Vakuumtrennfenster und seine Verwendung Radiant transmittance vacuum separating window and its use

Takehiko Nakahara; Masao Koshinaka; Nobuyuki Kosaka


Archive | 1992

Device for duennschichtbildung

Takehiko Nakahara; Masao Koshinaka; Nobuyuki Kosaka; Toshimasa Tomoda


Archive | 1992

Vorrichtung zur Untersuchung der Zusammensetzung dünner Schichten Device for analyzing the composition of thin films

Takehiko Nakahara; Masao Koshinaka; Nobuyuki Kosaka; Toshimasa Tomoda

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