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Masaru Nyui

Canon Inc.

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Publication

Featured researches published by Masaru Nyui.

Archive | 1997

Polishing method and polishing apparatus using the same

Masaru Nyui; Mikichi Ban; Kazuo Takahashi

Archive | 1997

Method and apparatus for measuring film thickness and film thickness distribution during polishing

Masaru Nyui; Mikichi Ban

Archive | 1998

Film thickness measuring method and apparatus

Yasushi Sugiyama; Mikichi Ban; Takehiko Suzuki; Masaru Nyui

Archive | 1993

Encoder with an optical scale and interference of zero and first order diffraction beams

Masaru Nyui; Masahiko Igaki; Ko Ishizuka

Archive | 1993

Talbot's interference type optical encoder

Masaru Nyui; Masahiko Igaki

Archive | 1992

Encoder using a birefringent element and a system including the same

Masahiko Igaki; Koh Ishizuka; Masaru Nyui

Archive | 1995

Rotation information detecting apparatus and method

Hiroshi Watanabe; Masaru Nyui

Archive | 1994

Rotation detector using dual position interference light

Masaru Nyui

Archive | 1997

Polishing endpoint determination method and apparatus

Mikichi Ban; Masaru Nyui

Archive | 1998

Measuring method and apparatus for using the same

Mikichi Ban; Masaru Nyui

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Collaboration

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Mikichi Ban

Canon Inc.

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Masahiko Igaki

Canon Inc.

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Koh Ishizuka

Canon Inc.

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Hiroshi Watanabe

Canon Inc.

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Kazuo Takahashi

Canon Inc.

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Ko Ishizuka

Canon Inc.

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Takehiko Suzuki

Canon Inc.

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Yasushi Sugiyama

Canon Inc.

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