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Mikichi Ban

Canon Inc.

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Publication

Featured researches published by Mikichi Ban.

Archive | 1997

Precision polishing apparatus with detecting means

Mikichi Ban; Matsuomi Nishimura; Kazuo Takahashi

Archive | 1997

Polishing method and polishing apparatus using the same

Masaru Nyui; Mikichi Ban; Kazuo Takahashi

Archive | 1997

Method and apparatus for measuring film thickness and film thickness distribution during polishing

Masaru Nyui; Mikichi Ban

Archive | 1990

Depth/height measuring device

Osamu Kakuchi; Mikichi Ban

Archive | 1979

Phase shifting mirror

Susumu Ito; Mikichi Ban

Archive | 1998

Film thickness measuring method and apparatus

Yasushi Sugiyama; Mikichi Ban; Takehiko Suzuki; Masaru Nyui

Archive | 1997

Precision polishing apparatus

Kazuo Takahashi; Mikichi Ban; Matsuomi Nishimura

Archive | 1981

Image forming optical system

Mikichi Ban

Archive | 1987

Fabri-perot spectroscopy method and apparatus utilizing the same

Mikichi Ban; Osamu Kakuchi; Hironori Yamamoto; Masaru Ohtsuka; Osamu Shiba; Kazuhiko Hara

Archive | 1986

Method and apparatus for measuring the thickness of a thin film using the spectral reflection factor of the film

Mikichi Ban; Yuki Toriumi; Kazuhiko Hara

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Collaboration

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Kazuo Takahashi

Canon Inc.

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Matsuomi Nishimura

Canon Inc.

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Masaru Nyui

Canon Inc.

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Kazuhiko Hara

Canon Inc.

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Osamu Ikeda

Canon Inc.

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Osamu Kakuchi

Canon Inc.

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Hironori Yamamoto

Canon Inc.

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Masaru Ohtsuka

Canon Inc.

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Osamu Shiba

Canon Inc.

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Shinzo Uchiyama

Canon Inc.

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