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Dive into the research topics where Masaru Ohto is active.

Publication


Featured researches published by Masaru Ohto.


Archive | 2005

Cleaning liquid and cleaning method

Kenji Shimada; Kojiro Abe; Masaru Ohto; Hiroshi Matsunaga


Archive | 2004

Cleaning solution and cleaning process using the solution

Hiroshi Matsunaga; Masaru Ohto; Kenji Yamada; Hidetaka Shimizu; Ken Tsugane; Seiki Oguni; Yoshiya Kimura


Archive | 2006

Etching composition for metal material and method for manufacturing semiconductor device by using same

Kazuyoshi Yaguchi; Kojiro Abe; Masaru Ohto


Archive | 2002

Method for releasing resist

Hidetaka Shimizu; Hiroshi Matsunaga; Masaru Ohto; Kazuto Ikemoto


Archive | 2004

Etching agent composition for thin films having high permittivity and process for etching

Kenji Yamada; Masaru Ohto


Archive | 2003

Method for removing resists

Kazuto Ikemoto; Hiroshi Matsunaga; Hidetaka Shimizu; Masaru Ohto


Archive | 2010

PROCESSING LIQUID FOR SUPPRESSING PATTERN COLLAPSE OF FINE METAL STRUCTURE AND METHOD FOR PRODUCING FINE METAL STRUCTURE USING SAME

Masaru Ohto; Hiroshi Matsunaga; Kenji Yamada


Archive | 2006

Composition for removing residue from wiring board and cleaning method

Eiko Kuwabara; Hideo Kashiwagi; Hiroshi Matsunaga; Masaru Ohto


Archive | 2003

Resist stripping liquid containing fluorine compound

Kazuto Ikemoto; Masaru Ohto


Archive | 1990

Process of pretreatment of metal-plating resin molded articles

Chiharu Nishizawa; Yoshiharu Kondo; Masaru Ohto

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Kenji Yamada

Tokyo University of Science

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