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Masaru Ohtsuka

Canon Inc.

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Publication

Featured researches published by Masaru Ohtsuka.

Archive | 1987

Movable stage mechanism

Motomu Furukawa; Makoto Higomura; Masaru Ohtsuka; Hironori Yamamoto; Shinkichi Ohkawa; Koichi Matsushita; Yasuo Kawai; Takao Kariya; Haruyuki Kusunoki; Toshihiko Yamaura

Archive | 2002

Apparatus and method for measuring a shape using multiple probes

Masaru Ohtsuka

Archive | 1991

Inchworm type driving mechanism

Masaru Ohtsuka

Archive | 1990

TWO-FREQUENCY DISTANCE AND DISPLACEMENT MEASURING INTERFEROMETER

Masaru Ohtsuka

Archive | 2004

Optical system in exposure apparatus, and device manufacturing method

Masaru Ohtsuka

Archive | 1993

Apparatus and method for measuring the error of an apparatus which measure a cylindrical shape using an interferometer

Masaru Ohtsuka

Archive | 1987

Fabri-perot spectroscopy method and apparatus utilizing the same

Mikichi Ban; Osamu Kakuchi; Hironori Yamamoto; Masaru Ohtsuka; Osamu Shiba; Kazuhiko Hara

Archive | 1998

Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head

Masaru Ohtsuka

Archive | 1997

Interferometer which varies a position to be detected based on inclination of surface to be measured

Masaru Ohtsuka

Archive | 1990

Length measuring apparatus

Masaru Ohtsuka

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Takao Kariya

Canon Inc.

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Hironori Yamamoto

Canon Inc.

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Hitoshi Iijima

Canon Inc.

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Seiichi Kamiya

Canon Inc.

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Makoto Higomura

Canon Inc.

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Motomu Furukawa

Canon Inc.

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Haruyuki Kusunoki

Canon Inc.

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Kazuhiko Hara

Canon Inc.

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Koichi Matsushita

Canon Inc.

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Mikichi Ban

Canon Inc.

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