Masumi Taninaka
Oki Electric Industry
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Publication
Featured researches published by Masumi Taninaka.
Journal of Applied Physics | 1996
Mitsuhiko Ogihara; Masumi Taninaka; Yukio Nakamura
The open‐tube diffusion of zinc in GaAs0.8P0.2 from a zinc‐doped silica film was investigated in detail. Aluminum nitride (AlN) and silicon nitride (SiNx) films were used as the anneal caps. The dependence of diffusion depth on the thickness of an AlN‐cap was found to differ from its dependence on SiNx‐cap thickness. The selective masked diffusion of zinc using an AlN diffusion‐mask was also systematically studied. The diffusion depth in selective masked diffusion was found to depend on both AlN‐cap thickness and AlN‐diffusion‐mask thickness. The experimental results suggest that diffusion depth is not necessarily governed by either cap thickness or diffusion‐mask thickness. From this standpoint, the role of film stress on diffusion depth was then quantitatively investigated. It was found that diffusion depth can be scaled well with total film stress in the measured film‐thickness range. In this sense, it can be concluded that total film stress is the primary factor that determines the diffusion depth und...
The Japan Society of Applied Physics | 1995
Masumi Taninaka; Mitsuhiko Ogihara; Takatoku Shimizu; Yukio Nakamura
The development of a double-funaion light-emitring-diode (DFLED) is repofled for the first time. A DFLED is a pn junction which works as a light-emitting-diode (.ED) and works as a photoseNor 8s well. The DFLED has a shallow junction (0.8pm) region and a deep junction (5pm) region. In this work, it is found out that the use of an aluminun oxide (AIOJ thin film is essefiial to fabricate the shallow junction region. It has been confirmed that the DFLED has the super.ior performances ss both of I photosensor and a LED.
Archive | 1996
Mitsuhiko Ogihara; Yukio Nakamura; Masumi Koizumi; Masumi Taninaka
Archive | 1999
Masumi Taninaka; Mitsuhiko Ogihara; Takatoku Shimizu
Archive | 2003
Masumi Taninaka; Hiroyuki Fujiwara; Hiroshi Hamano; Masaharu Nobori
Archive | 1998
Masumi Taninaka; Mitsuhiko Ogihara; Hiroshi Hamano; Takatoku Shimizu
Archive | 1997
Yukio Nakamura; Mitsuhiko Ogihara; Masumi Taninaka; Takao Kusano; Masumi Koizumi; Hiroyuki Fujiwara; Makoto Ishimaru; Masaharu Nobori; Tsutomu Nomoto
Archive | 1994
Mitsuhiko Ogihara; Yukio Nakamura; Takatoku Shimizu; Masumi Taninaka
Archive | 2000
Mitsuhiko Ogihara; Kazuo Tokura; Yukio Nakamura; Masumi Taninaka; Takatoku Shimizu
Archive | 1998
Kazuo Tokura; Yukio Nakamura; Mitsuhiko Ogihara; Masumi Taninaka