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Matsutaro Miyamoto

Ebara Corporation

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Publication

Featured researches published by Matsutaro Miyamoto.

Archive | 2001

Magnetic levitation rotating machine

Atsushi Ooyama; Toshiharu Nakazawa; Matsutaro Miyamoto

Archive | 1998

Magnetic bearing control device and turbo-molecular pump device

Akiko Taira; Hiroyuki Chino; Toshiharu Nakazawa; Matsutaro Miyamoto

Archive | 2005

Magnetic bearing device and turbo-type vacuum pump

Matsutaro Miyamoto; Toshiharu Nakazawa; Toshiharu Ochiai; Shinichi Sekiguchi; 敏治 中澤; 松太郎 宮本; 俊治 落合; 信一 関口

Archive | 1998

Magnetic bearing device and turbo-molecular pump device

Akiko Taira; Hiroyuki Chino; Toshiharu Nakazawa; Matsutaro Miyamoto

Archive | 2015

TOP OPENING-CLOSING MECHANISM AND INSPECTION APPARATUS

Matsutaro Miyamoto

Archive | 2007

ELECTRON BEAM DEVICE AND PATTERN EVALUATION METHOD

Toshifumi Kaneuma; Tsutomu Karimata; Matsutaro Miyamoto; Mamoru Nakasuji; 護 中筋; 松太郎 宮本; 努 狩俣; 利文 金馬

Archive | 2017

SUBSTRATE HOLDER AND PLATING APPARATUS USING THE SAME

Matsutaro Miyamoto

Archive | 2014

VACUUM PUMP CONNECTING APPARATUS AND METHOD FOR INSTALLING VACUUM PUMP CONNECTING APPARATUS

Matsutaro Miyamoto

Archive | 2001

Rotary machine having magnetic levitation system

Matsutaro Miyamoto; Toshiharu Nakazawa; Atsushi Ooyama

Archive | 2001

Rotationsmaschine mit Magnetschwebesystem Rotary machine with magnetic levitation system

Atsushi Ooyama; Toshiharu Nakazawa; Matsutaro Miyamoto

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Collaboration

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Toshiharu Nakazawa

Ebara Corporation

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Akiko Taira

Ebara Corporation

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Atsushi Ooyama

Ebara Corporation

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Hiroyuki Chino

Ebara Corporation

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Atsushi Shiokawa

Ebara Corporation

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Hiroshi Sobukawa

Ebara Corporation

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Mamoru Nakasuji

Nikon

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Shinichi Sekiguchi

Ebara Corporation

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Shunichi Aiyoshizawa

Ebara Corporation

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Tsutomu Karimata

Ebara Corporation

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