Mamoru Nakasuji | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Mamoru Nakasuji is active.

Explore More

Publication

Featured researches published by Mamoru Nakasuji.

Archive | 2001

Inspection system by charged particle beam and method of manufacturing devices using the system

Mamoru Nakasuji; Nobuharu Noji; Tohru Satake; Masahiro Hatakeyama; Toshifumi Kimba; Hiroshi Sobukawa; Shoji Yoshikawa; Takeshi Murakami; Kenji Watanabe; Tsutomu Karimata; Shin Oowada; Mutsumi Saito; Yuichiro Yamazaki; Takamitsu Nagai; Ichirota Nagahama

Archive | 2003

Electron beam apparatus and method of manufacturing semiconductor device using the apparatus

Mamoru Nakasuji; Tohru Satake; Kenji Watanabe; Takeshi Murakami; Nobuharu Noji; Hirosi Sobukawa; Tsutomu Karimata; Shoji Yoshikawa; Toshifumi Kimba; Shin Oowada; Mutsumi Saito; Muneki Hamashima; Toru Takagi; Naoto Kihara; Hiroshi Nishimura

Archive | 2004

Sheet beam-type inspection apparatus

Mamoru Nakasuji; Nobuharu Noji; Tohru Satake; Toshifumi Kimba; Hirosi Sobukawa; Tsutomu Karimata; Shin Oowada; Shoji Yoshikawa; Mutsumi Saito

Archive | 2011

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

Toshifumi Kimba; Tohru Satake; Tsutomu Karimata; Kenji Watanabe; Nobuharu Noji; Takeshi Murakami; Masahiro Hatakeyama; Mamoru Nakasuji; Hirosi Sobukawa; Shoji Yoshikawa; Shin Oowada; Mutsumi Saito

Archive | 2001

Method for inspecting substrate, substrate inspecting system and electron beam apparatus

Mamoru Nakasuji; Nobuharu Noji; Tohru Satake; Toshifumi Kimba; Masahiro Hatakeyama; Kenji Watanabe; Hirosi Sobukawa; Tsutomu Karimata; Shoji Yoshikawa; Shin Oowada; Mutsumi Saito; Muneki Hamashima

Archive | 2008

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Kenji Watanabe; Hirosi Sobukawa; Nobuharu Noji; Tohru Satake; Shoji Yoshikawa; Tsutomu Karimata; Mamoru Nakasuji; Masahiro Hatakeyama; Takeshi Murakami; Yuichiro Yamazaki; Ichirota Nagahama; Takamitsu Nagai; Kazuyoshi Sugihara

Archive | 2001

Electron beam apparatus and device production method using the electron beam apparatus

Mamoru Nakasuji; Tohru Satake; Nobuharu Noji; Hirosi Sobukawa; Tsutomu Karimata; Shoji Yoshikawa; Toshifumi Kimba; Shin Oowada; Mutsumi Saito; Muneki Hamashima; Yoshiaki Kohama; Yukiharu Okubo

Archive | 2008