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Matteo Perletti

STMicroelectronics

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Publication

Featured researches published by Matteo Perletti.

Archive | 2009

INTEGRATED ACOUSTIC TRANSDUCER OBTAINED USING MEMS TECHNOLOGY, AND CORRESPONDING MANUFACTURING PROCESS

Sebastiano Conti; Matteo Perletti

Archive | 2014

Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device

Stefano Losa; Raffaella Pezzuto; Roberto Campedelli; Matteo Perletti; Luigi Esposito; Mikel Azpeitia Urquia

Archive | 2014

WAFER LEVEL ASSEMBLY OF A MEMS SENSOR DEVICE AND RELATED MEMS SENSOR DEVICE

Sebastiano Conti; Matteo Perletti; Roberto Carminati; Lorenzo Baldo; Alessandro Morcelli

Archive | 2014

DETECTION STRUCTURE FOR A MEMS ACOUSTIC TRANSDUCER WITH IMPROVED ROBUSTNESS TO DEFORMATION

Matteo Perletti; Sebastiano Conti; Roberto Carminati; Marcella Capezzuto

Archive | 2011

PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURIED AREA PROVIDED WITH A FILTER

Marco Ferrera; Matteo Perletti; Igor Varisco; Luca Zanotti

Archive | 2014

Microelectromechanical sensing structure for a capacitive acoustic transducer including an element limiting the oscillations of a membrane, and manufacturing method thereof

Alessandra Sciutti; Matteo Perletti; Sebastiano Conti; Roberto Carminati

Archive | 2018

INTEGRATED ELECTROACOUSTIC MEMS TRANSDUCER WITH IMPROVED SENSITIVITY AND MANUFACTURING PROCESS THEREOF

Matteo Perletti; Stefano Losa; Lorenzo Tentori; Maria Carolina Turi

Archive | 2017

DRY SCRIBING METHODS, DEVICES AND SYSTEMS

Matteo Perletti; Pietro Petruzza; Ilaria Gelmi; Laura Maria Castoldi

Archive | 2014

MICROMECHANICAL DETECTION STRUCTURE FOR A MEMS ACOUSTIC TRANSDUCER AND CORRESPONDING MANUFACTURING PROCESS

Sebastiano Conti; Marco Salina; Luca Lamagna; Matteo Perletti

Archive | 2014

Verfahren zur Herstellung einer Schutzschicht gegen HF-Ätzen, mit der Schutzschicht ausgestattete Halbleitervorrichtung, und Verfahren zur Herstellung der Halbleitervorrichtung

Stefano Losa; Raffaella Pezzuto; Roberto Campedelli; Matteo Perletti; Luigi Esposito; Mikel Azpeitia Urquia

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Collaboration

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Sebastiano Conti

STMicroelectronics

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Stefano Losa

STMicroelectronics

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Luigi Esposito

STMicroelectronics

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Mikel Azpeitia Urquia

STMicroelectronics

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Raffaella Pezzuto

STMicroelectronics

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Roberto Campedelli

STMicroelectronics

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Roberto Carminati

STMicroelectronics

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Alessandra Sciutti

STMicroelectronics

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Alessandro Morcelli

STMicroelectronics

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Francesco Tripodi

STMicroelectronics

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