Matteo Perletti

INTEGRATED ACOUSTIC TRANSDUCER OBTAINED USING MEMS TECHNOLOGY, AND CORRESPONDING MANUFACTURING PROCESS

Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device

WAFER LEVEL ASSEMBLY OF A MEMS SENSOR DEVICE AND RELATED MEMS SENSOR DEVICE

DETECTION STRUCTURE FOR A MEMS ACOUSTIC TRANSDUCER WITH IMPROVED ROBUSTNESS TO DEFORMATION

PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURIED AREA PROVIDED WITH A FILTER

Microelectromechanical sensing structure for a capacitive acoustic transducer including an element limiting the oscillations of a membrane, and manufacturing method thereof

INTEGRATED ELECTROACOUSTIC MEMS TRANSDUCER WITH IMPROVED SENSITIVITY AND MANUFACTURING PROCESS THEREOF

DRY SCRIBING METHODS, DEVICES AND SYSTEMS

MICROMECHANICAL DETECTION STRUCTURE FOR A MEMS ACOUSTIC TRANSDUCER AND CORRESPONDING MANUFACTURING PROCESS

Verfahren zur Herstellung einer Schutzschicht gegen HF-Ätzen, mit der Schutzschicht ausgestattete Halbleitervorrichtung, und Verfahren zur Herstellung der Halbleitervorrichtung