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Featured researches published by Stefano Losa.


international conference on simulation of semiconductor processes and devices | 2017

Simulation of micro-mirrors for optical MEMS

M. Zanuccoli; Claudio Fiegna; E. Cianci; C. Wiemer; A. Lamperti; G. Tallarida; Luca Lamagna; Stefano Losa; S. Rossini; F. Vercesi; I. Semenikhin

In this paper we present the application of a computationally efficient Rigorous Coupled-Wave Analysis method to solve the electromagnetic radiation scattering problem in devices featuring nano-structured interfaces and multilayer structures. The method, already successfully used to simulate photon propagation and absorption in thin-film solar cells, is used in this work to compute the optical reflectivity of micro- mirrors in Micro-Opto-Electro-Mechanical Systems (MOEMS).


Archive | 2010

Process for manufacturing mems devices having buried cavities and mems device obtained thereby

Pietro Corona; Stefano Losa; Ilaria Gelmi; Roberto Campedelli


Archive | 2014

Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device

Stefano Losa; Raffaella Pezzuto; Roberto Campedelli; Matteo Perletti; Luigi Esposito; Mikel Azpeitia Urquia


Applied Surface Science | 2016

Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

Maria Berdova; C. Wiemer; A. Lamperti; G. Tallarida; Elena Cianci; Luca Lamagna; Stefano Losa; Silvia Rossini; Roberto Somaschini; Salvatore Gioveni; M. Fanciulli; Sami Franssila


Archive | 2014

MICRO-ELECTRO-MECHANICAL DEVICE WITH BURIED CONDUCTIVE REGIONS, AND MANUFACTURING PROCESS THEREOF

Roberto Campedelli; Raffaella Pezzuto; Stefano Losa; Marco Mantovani; Mikel Azpeitia Urquia


Archive | 2018

INTEGRATED ELECTROACOUSTIC MEMS TRANSDUCER WITH IMPROVED SENSITIVITY AND MANUFACTURING PROCESS THEREOF

Matteo Perletti; Stefano Losa; Lorenzo Tentori; Maria Carolina Turi


Archive | 2014

Mikroelektromechanische Vorrichtung mit vergrabenen leitfähigen Bereichen sowie Verfahren zum Herstellen derselben

Roberto Campedelli; Raffaella Pezzuto; Stefano Losa; Marco Mantovani; Mikel Azpeitia Urquia


Archive | 2014

Verfahren zur Herstellung einer Schutzschicht gegen HF-Ätzen, mit der Schutzschicht ausgestattete Halbleitervorrichtung, und Verfahren zur Herstellung der Halbleitervorrichtung

Stefano Losa; Raffaella Pezzuto; Roberto Campedelli; Matteo Perletti; Luigi Esposito; Mikel Azpeitia Urquia


Archive | 2012

Mikroelektromechanische Vorrichtung mit vergrabenen leitfähigen Bereichen sowie Verfahren zum Herstellen derselben A microelectromechanical device with buried conductive regions and methods of making the same

Roberto Campedelli; Raffaella Pezzuto; Stefano Losa; Marco Mantovani; Mikel Azpeitia Urquia


Archive | 2012

Verfahren zur Herstellung einer Schutzschicht gegen HF-Ätzen, mit der Schutzschicht ausgestattete Halbleitervorrichtung, und Verfahren zur Herstellung der Halbleitervorrichtung A process for preparing a protective layer against HF etching, with the protective layer-equipped semiconductor device and method of manufacturing the semiconductor device

Stefano Losa; Raffaella Pezzuto; Roberto Campedelli; Matteo Perletti; Luigi Esposito; Mikel Azpeitia Urquia

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