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Matthias Bonkass

Advanced Micro Devices

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Publication

Featured researches published by Matthias Bonkass.

Archive | 2002

Method of electroplating copper over a patterned dielectric layer

Matthias Bonkass; Axel Preusse; Markus Nopper

Archive | 2003

Method and system for controlling ion distribution during plating of a metal on a workpiece surface

Matthias Bonkass; Axel Preusse

Archive | 2005

Method and system for controlling a substrate position in an electrochemical process

Matthias Bonkass; Axel Preusse; Markus Nopper

Archive | 2006

Verfahren und System zum Steuern einer Substratposition in einem elektrochemischen Prozess

Matthias Bonkass; Axel Preusse; Markus Nopper

Archive | 2004

Method and system for automatically controlling a current distribution of a multi-anode arrangement during the plating of a metal on a substrate surface

Matthias Bonkass; Dirk Wollstein; Axel Preusse

Archive | 2005

Technique for metal deposition by electroless plating using an activation scheme including a substrate heating process

Markus Nopper; Axel Preusse; Matthias Bonkass

Archive | 2004

Verfahren und System zum Steuern der Ionenverteilung während des galvanischen Auftragens eines Metalls auf eine Werkstückoberfläche

Matthias Bonkass; Axel Preusse

Archive | 2006

Technik zur Metallabscheidung durch stromloses Plattieren unter Anwendung eines Aktivierungsschemas mit einem Substraterwärmungsprozess

Markus Nopper; Axel Preusse; Matthias Bonkass

Archive | 2005

Technik zur Metallabscheidung durch stromloses Plattieren unter Anwendung eines Aktivierungsschemas mit einem Substraterwärmungsprozess Technique for metal deposition by electroless plating using an activation scheme with a substrate heating process

Matthias Bonkass; Markus Nopper; Axel Preusse

Archive | 2005

Verfahren und System zum Steuern einer Substratposition in einem elektrochemischen Prozess A method and system for controlling a position of the substrate in an electrochemical process

Matthias Bonkass; Markus Nopper; Axel Preusse

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Collaboration

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Axel Preusse

GlobalFoundries

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Markus Nopper

GlobalFoundries

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Axel Preusse

GlobalFoundries

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Markus Nopper

GlobalFoundries

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Dirk Wollstein

Advanced Micro Devices

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