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Matthias Metz

Bosch

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Publication

Featured researches published by Matthias Metz.

Archive | 2005

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Markus Lutz; Aaron Partridge; Wilhelm Frey; Markus Ulm; Matthias Metz; Brian Stark; Gary Yama

Archive | 2006

Microelectromechanical systems encapsulation process

Markus Ulm; Brian Stark; Matthias Metz; Tino Fuchs; Franz Laermer; Silvia Kronmueller

Archive | 2007

Microelectromechanical Systems Encapsulation Process with Anti-Stiction Coating

Cyril Vancura; Markus Ulm; Brian Stark; Matthias Metz; Tino Fuchs; Franz Laermer; Silvia Kronmueller

Archive | 2006

Tri-axis accelerometer having a single proof mass and fully differential output signals

Zhiyu Pan; Christoph Lang; Gary Yama; Matthias Metz; Markus Ulm

Archive | 2004

Manufacture of micromechanical pressure sensor, has measuring element formed from resistance layer deposited using sputtering process with airflow in region of deposition

Herbert Goebel; Martin Fischer; Andre Kretschmann; Ralf Henn; Winfried Bernhard; Matthias Metz; Werner Steiner

Archive | 2008

Method of producing a device

Markus Ulm; Brian Stark; Matthias Metz

Archive | 2007

Procédé d'encapsulation de microsystèmes électromécaniques comportant un revêtement anti-frottement statique

Cyril Vancura; Markus Ulm; Brian Stark; Matthias Metz; Tino Fuchs; Franz Laermer; Silvia Kronmueller

Archive | 2007

Dispositif de récupération d'énergie obtenu par processus d'impression

Markus Ulm; Brian Stark; Matthias Metz

Archive | 2007

Mittels druckerzeugungsverfahren hergestellte energiegewinnungsvorrichtung

Matthias Metz; Brian Stark; Markus Ulm

Archive | 2007

Mikroelektromechanisches systemeinkapselverfahren mit anti-haftreibungsbeschichtung

Tino Fuchs; Silvia Kronmueller; Franz Laermer; Matthias Metz; Brian Stark; Markus Ulm; Cyril Vancura

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Collaboration

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Markus Ulm

Bosch

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Brian Stark

Bosch

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Silvia Kronmueller

Bosch

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Tino Fuchs

Bosch

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Cyril Vancura

Bosch

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Franz Laermer

Technische Universität München

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Gary Yama

Bosch

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Aaron Partridge

Bosch

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Andre Kretschmann

Bosch

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Christoph Lang

Bosch

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