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Silvia Kronmueller

Bosch

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Publication

Featured researches published by Silvia Kronmueller.

Archive | 2007

Microelectromechanical systems, and methods for encapsualting and fabricating same

Aaron Partridge; Markus Lutz; Silvia Kronmueller

Archive | 2005

Microelectromechanical systems having trench isolated contacts, and methods for fabricating same

Aaron Partridge; Markus Lutz; Silvia Kronmueller

Archive | 2003

Method of fabricating microelectromechanical systems and devices having trench isolated contacts

Aaron Partridge; Markus Lutz; Silvia Kronmueller

Archive | 2006

Micromechanical component and corresponding method for its manufacture

Frank Reichenbach; Franz Laermer; Silvia Kronmueller; Christoph Schelling; Tino Fuchs; Christina Leinenbach

Archive | 2005

Microelectromechanical systems and devices having thin film encapsulated mechanical structures

Aaron Partridge; Markus Lutz; Silvia Kronmueller

Archive | 2009

Electromechanical system having a controlled atmosphere, and method of fabricating same

Aaron Partridge; Markus Lutz; Silvia Kronmueller

Archive | 2005

Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same

Markus Lutz; Aaron Partridge; Silvia Kronmueller

Archive | 2009

Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics

Aaron Partridge; Markus Lutz; Silvia Kronmueller

Archive | 2010

Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same

Aaron Partridge; Markus Lutz; Silvia Kronmueller

Archive | 2008

Method for producing a capping wafer for a sensor

Frank Reichenbach; Franz Laermer; Silvia Kronmueller; Andreas Scheurle

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Collaboration

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Christoph Schelling

Bosch

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Aaron Partridge

Bosch

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Markus Lutz

Bosch

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Franz Laermer

Technische Universität München

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Ando Feyh

Bosch

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Tino Fuchs

Bosch

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Gerhard Lammel

Bosch

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Hubert Benzel

Bosch

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Matthias Illing

Bosch

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Paul Farber

Bosch

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