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Mehrdad M. Moslehi

University of Rochester

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Publication

Featured researches published by Mehrdad M. Moslehi.

Archive | 1998

Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectrics

Mehrdad M. Moslehi

Archive | 2002

Microelectronic interconnect material with adhesion promotion layer and fabrication method

Ajit P. Paranjpe; Mehrdad M. Moslehi; Boris Relja; Randhir S. Bubber; Lino A. Velo; Thomas R. Omstead; David R. Campbell; David M. Leet; Sanjay Gopinath

Archive | 1998

Method for forming a copper film on a substrate

Ajit P. Paranjpe; Mehrdad M. Moslehi; Lino A. Velo; Thomas R. Omstead; David R. Campbell; Zeming Liu; Guihua Shang

Archive | 1998

Semiconductor chip interconnect barrier material and fabrication method

Ajit P. Paranjpe; Mehrdad M. Moslehi; Randhir S. Bubber; Lino A. Velo

Archive | 2000

Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing

Mehrdad M. Moslehi

Archive | 2000

Apparatus for supporting a substrate in a reaction chamber

Thomas R. Omstead; Panya Wongsenakhum; William J. Messner; Edward J. Nagy; William Starks; Mehrdad M. Moslehi

Archive | 2000

Method of chemical-vapor deposition of a material

Ajit P. Paranjpe; Randhir S. Bubber; Sanjay Gopinath; Thomas R. Omstead; Mehrdad M. Moslehi

Archive | 1998

Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure

Mehrdad M. Moslehi; Cecil J. Davis; Christopher J. Mann; Dwain R. Jakubik; Ajit P. Paranjpe

Archive | 2000

Shutter for thin-film processing equipment

Mehrdad M. Moslehi

Archive | 1999

Thermally conductive chuck for vacuum processor

Mehrdad M. Moslehi

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Cecil J. Davis

University of Rochester

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Thomas R. Omstead

University of Rochester

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Ajit P. Paranjpe

University of Rochester

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Dorian Heimanson

University of Rochester

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Edward J. Nagy

University of Rochester

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Lino A. Velo

University of Rochester

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Panya Wongsenakhum

University of Rochester

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Randhir S. Bubber

University of Rochester

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Shiyuan Cheng

University of Rochester

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William J. Messner

University of Rochester

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