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Michael A. Todd

ASM International

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Publication

Featured researches published by Michael A. Todd.

Archive | 2009

Process for Deposition of Semiconductor Films

Michael A. Todd; Mark R. Hawkins

Archive | 2002

Improved process for deposition of semiconductor films

Michael A. Todd; Mark R. Hawkins

Archive | 2001

CVD syntheses of silicon nitride materials

Michael A. Todd

Archive | 2003

Method to form ultra high quality silicon-containing compound layers

Michael A. Todd; Keith Doran Weeks; Christiaan Werkhoven; Christophe F. Pomarede

Archive | 2001

Fluorine-containing materials and processes

Michael A. Todd

Archive | 2002

Deposition over mixed substrates

Michael A. Todd

Archive | 2005

Low temperature silicon compound deposition

Ruben Haverkort; Yuet Mei Wan; Marinus J. De Blank; Cornelius A. van der Jeugd; Jacobus Johannes Beulens; Michael A. Todd; Keith Doran Weeks; Christian J. Werkhoven; Christophe F. Pomarede

Archive | 2007

Thin films and methods of making them

Michael A. Todd; Ivo Raaijmakers

Archive | 2002

Integration of High K Gate Dielectric

Christophe F. Pomarede; Michael Givens; Eric Shero; Michael A. Todd

Archive | 2002

Thin films and method of making them

Michael A. Todd; Ivo Raaijmakers

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Keith Doran Weeks

ASM International

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Ivo Raaijmakers

ASM International

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Mark R. Hawkins

ASM International

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Atsuki Fukazawa

ASM International

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Christophe F. Pomarede

ASM International

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Kiyohiro Matsushita

ASM International

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Naoto Tsuji

ASM International

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Satoshi Takahashi

ASM International

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Yukihiro Mori

ASM International

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Nobuo Matsumoto

ASM International

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