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Michael Dr. Steigerwald

Carl Zeiss AG

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Publication

Featured researches published by Michael Dr. Steigerwald.

Archive | 2003

Objective lens for an electron microscopy system and electron microscopy system

Dirk Preikszas; Michael Dr. Steigerwald; Peter Dipl.-Phys. Hoffrogge; Peter Gnauck

Archive | 2002

Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same

Oliver Kienzle; Dirk Stenkamp; Michael Dr. Steigerwald; Rainer Knippelmeyer; Max Haider; Heiko Müller; Stephan Uhlemann

Archive | 2008

Scanning charged particle beams

Dirk Preikszas; Michael Dr. Steigerwald; Joerg Ackermann

Archive | 2003

Particle-optical arrangements and particle-optical systems

Dirk Preikszas; Michael Dr. Steigerwald

Archive | 2009

Electron-beam device and detector system

Michael Dr. Steigerwald; Dirk Preikszas; Volker Drexel

Archive | 2004

Elektronenstrahlgerät und Detektoranordnung

Michael Dr. Steigerwald; Dirk Preikszas; Volker Drexel

Microscopy and Microanalysis | 2003

New Detection Principles and Developments on the GEMINI SUPRA FE-SEM

Heiner Jaksch; Michael Dr. Steigerwald; Volker Drexel; H. Bihr

Archive | 2004

Electron beam apparatus and detector arrangement

Dirk Preikszas; Michael Dr. Steigerwald

Archive | 2004

Electron microscopy system, electron microscopy method and focusing system for charged particles

Michael Dr. Steigerwald; Erik Essers

Microscopy and Microanalysis | 2005

Technologies to Characterize Nanostructured Particles and Bulk Materials

Heiner Jaksch; Michael Dr. Steigerwald; Volker Drexel

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Collaboration

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Dirk Preikszas

Carl Zeiss AG

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Dietmar Dönitz

Carl Zeiss AG

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Erik Essers

Carl Zeiss AG

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Dirk Stenkamp

Carl Zeiss AG

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Oliver Kienzle

Carl Zeiss AG

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Rainer Knippelmeyer

Carl Zeiss AG

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Volker Drexel

Carl Zeiss AG

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Max Haider

Carl Zeiss AG

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Andreas Eisele

Carl Zeiss AG

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Christian Hendrich

Carl Zeiss AG

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