Oliver Kienzle
Carl Zeiss AG
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Publication
Featured researches published by Oliver Kienzle.
SPIE's 27th Annual International Symposium on Microlithography | 2002
Oliver Kienzle; Rainer Knippelmeyer; Wilfried Dr. Clauß; M. Matijevic; Lars Ehrhardt; Wolf Dieter Rau; Alexander Orchowski
We have successfully produced and outfitted in-lens deflector elements which can be used for off-axis aberration correction in high throughput electron optics. A thorough analysis of mechanical tolerances, the study of the effect of mechanical tolerances on the imaging performance, and the comparison of calculated and measured deflection fields indicate the capability of such deflector elements for reaching the demands of high throughput electron optical devices.
Archive | 2004
Rainer Knippelmeyer; Oliver Kienzle; Thomas Kemen; Heiko Mueller; Stephan Uhlemann; Maximilian Haider; Antonio Casares; Steven R. Rogers
Archive | 2002
Oliver Kienzle; Dirk Stenkamp; Michael Dr. Steigerwald; Rainer Knippelmeyer; Max Haider; Heiko Müller; Stephan Uhlemann
Archive | 2001
Oliver Kienzle; Holger Weigand
Archive | 2003
Oliver Kienzle; Rainer Knippelmeyer; Ingo Dr. Müller
Archive | 2003
Oliver Kienzle; Rainer Knippelmeyer; Heiko Müller
Archive | 2003
Oliver Kienzle; Rainer Knippelmeyer
Archive | 2003
Oliver Kienzle; Rainer Knippelmeyer
Archive | 2003
Oliver Kienzle; Rainer Knippelmeyer; Stephan Uhlemann; Max Haider; Heiko Müller
Archive | 2003
Oliver Kienzle; Rainer Knippelmeyer
