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Michael O. Thompson

Ultratech, Inc.

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Publication

Featured researches published by Michael O. Thompson.

Archive | 2006

Laser thermal annealing of lightly doped silicon substrates

Somit Talwar; Michael O. Thompson; Boris Grek; David A. Markle

Archive | 2000

High-speed semiconductor transistor and selective absorption process forming same

Somit Talwar; Yun Wang; Michael O. Thompson

Archive | 2000

Thermally induced phase switch for laser thermal processing

Andrew M. Hawryluk; Somit Talwar; Yun Wang; David A. Markle; Michael O. Thompson

Archive | 2002

Method for laser thermal processing using thermally induced reflectivity switch

Andrew M. Hawryluk; Somit Talwar; Yun Wang; Michael O. Thompson

Archive | 2001

Thermally induced reflectivity switch for laser thermal processing

Andrew M. Hawryluk; Somit Talwar; Yun Wang; Michael O. Thompson

Archive | 2001

Method of forming thermally induced reflectivity switch for laser thermal processing

Andrew M. Hawryluk; Somit Talwar; Yun Wang; Michael O. Thompson

Archive | 2002

Selective absorption process for forming an activated doped region in a semiconductor

Somit Talwar; Yun Wang; Michael O. Thompson

Archive | 2004

Silicon layer for uniformizing temperature during photo-annealing

Somit Talwar; Michael O. Thompson

Archive | 2004

Heated chuck for laser thermal processing

Iqbal A. Shareef; Igor Landau; David A. Markle; Somit Talwar; Michael O. Thompson; Ivelin A. Angelov; Senquan Zhou

Archive | 2005

Heat shield for thermal processing

Iqbal A. Shareef; Boris Grek; Michael O. Thompson

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Collaboration

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Somit Talwar

Stanford University

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Yun Wang

Ultratech

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Andrew M. Hawryluk

Ultratech

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David A. Markle

Ultratech

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Iqbal A. Shareef

Ultratech

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Igor Landau

Ultratech

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Ivelin A. Angelov

Ultratech

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Senquan Zhou

Ultratech

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Boris Grek

Ultratech

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