Michael Sundermann
Carl Zeiss AG
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Featured researches published by Michael Sundermann.
Nano Letters | 2008
Theobald Lohmüller; Michael Helgert; Michael Sundermann; Robert Brunner; Joachim P. Spatz
We report an innovative approach for the fabrication of highly light transmissive, antireflective optical interfaces. This is possible due to the discovery that metallic nanoparticles may be used as a lithographic mask to etch nonstraightforward structures into fused silica, which results in a quasihexagonal pattern of hollow, pillar-like protuberances. The far reaching optical performance of these structures is demonstrated by reflection and transmission measurements at oblique angles of incidence over a broad spectral region ranging from deep-ultraviolet to infrared light.
Optics Express | 2010
Dennis Lehr; Michael Helgert; Michael Sundermann; Christoph Morhard; Claudia Pacholski; Joachim P. Spatz; Robert Brunner
Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabrication technology the local topography of the periodic structure may deviate from the perfect repetition of a sub-wavelength unit cell. We used rigorous coupled-wave analysis (RCWA) to simulate the efficiency losses due to scattering effects based on height and displacement variations between the individual protuberances. In these simulations we chose conical and Super-Gaussian shapes to approximate the real profile of fabricated structures. The simulation results are in accordance with the experimentally determined optical properties of sub-wavelength structures over a broad wavelength range. Especially the transmittance reduction in the deep-UV could be ascribed to these variations in the sub-wavelength structures.
Applied Optics | 2012
Claudia Pacholski; Christoph Morhard; Joachim P. Spatz; Dennis Lehr; Marcel Schulze; Ernst-Bernhard Kley; Andreas Tünnermann; Michael Helgert; Michael Sundermann; Robert Brunner
Antireflective subwavelength structures (ARS) resembling nanostructures found on the cornea of night-active insects reduce the reflection of light by providing a gradual change in the refractive index at the interface. These artificial ARS have mainly been fabricated by a combination of conventional lithography and reactive ion etching, which constrains their application to planar substrates. We report on the fabrication of ARS using three different techniques including bottom-up and top-down methods as well as their combination on microlens arrays (MLAs) made of fused silica. The optical performance of the resulting ARS on the MLAs is as good as ARS fabricated on planar substrates with increased transmission of up to 96% at certain wavelengths.
Applied Optics | 2014
Hans Becker; Diana Tonova; Michael Sundermann; Henrik Ehlers; Stefan Günster; Detlev Ristau
Practically all thin film systems for normal incidence can be realized using only two-layer materials. But for oblique incidence, polarization effects occur, designs may become complex, and polarization control is difficult or impossible to achieve. Here multi-index or gradient designs offer additional degrees of freedom, and can simplify or even enable challenging designs. Such gradient thin film stacks can be designed ab initio without any start or index profile approximations using a new design software developed by Carl Zeiss. With this software, a rugate omnidirectional AR coating was calculated and transferred to three different multi-index systems. All three examples were realized using ion beam sputter technology, and characterized at Laser Zentrum Hannover. Here we present comparative measurements of the optical performance together with femtosecond laser-induced damage threshold measurements.
Journal of Nanophotonics | 2016
Stephane Bruynooghe; Marcel Schulze; Michael Helgert; Michel Challier; Diana Tonova; Michael Sundermann; Thomas Koch; Alexandre Gatto; Ernst-Bernhard Kley
Abstract. To reduce the intensity of the Fresnel reflections of optical components, subwavelength structures prepared by reactive ion etching of SiO2 thin films were combined as the outermost layer with a multilayer system made of conventional thin-film materials. A hybrid coating was thus realized, with the nanoscaled structured outermost layer expected to further improve the antireflection properties of common interference stacks. The microscopic and optical spectroscopic analysis of the subwavelength structures revealed that pillar-shaped nanostructures formed during etching exhibit low-refractive-index properties and have a depth-dependent refractive index. To take into account the refractive-index gradient in the coating design, the optical properties of the nanostructures were modeled using the effective-medium approximation. The calculated average effective refractive index turned out to be 1.11 at 500-nm wavelength. A hybrid coating was designed to minimize the residual reflectance in the 400-nm to 900-nm spectral range for BK7 glass substrate. Experimental results demonstrated that the hybrid-coating approach yields a low residual reflectance with very good omnidirectional properties, owing to the properties of the nanostructured surface.
Proceedings of SPIE | 2015
Stephane Bruynooghe; Michael Helgert; M. Challier; Diana Tonova; Michael Sundermann; Thomas Koch; Alexandre Gatto; Marcel Schulze; Ernst-Bernhard Kley
To further reduce the intensity of the Fresnel reflections of optical components, subwavelength structures prepared by reactive ion etching of SiO2 thin films are combined as outermost layer with a multilayer system made of conventional thin film materials and prepared by magnetron sputtering. In this approach, a hybrid coating is realized in which the nanoscaled structured outermost layer is expected to further improve the antireflection properties of common interference stacks. The subwavelength structures are examined by spectroscopic ellipsometry, spectral photometry and scanning electron microscopy. The microscopic and optical spectroscopic analysis revealed that pillar-shaped nanostructures are formed during etching which exhibit low-index properties and have a depth-dependent refractive index. To take into account the index gradient in the coating design, the optical properties of the nanostructures are modeled using the effective medium approximation. The calculated average effective refractive index is 1.11 at 500 nm wavelength. A hybrid coating was designed to minimize the residual reflectance in the 400 – 900 nm spectral range for BK7 glass substrate. Experimental results showed that the hybrid coating achieves a low residual reflectance with very good omni-directional properties, owing to the properties of its nanostructured surface. The residual reflection of the hybrid coating is found to be two times smaller than the reflection obtained by applying a common interference multilayer system which demonstrates the benefit of the use of hybrid systems for the realization of broadband antireflective coatings with wide-angle properties.
Optical Systems Design 2015: Advances in Optical Thin Films V | 2015
Hans Becker; Diana Tonova; Michael Sundermann; Lars Jensen; Mark Gyamfi; Detlev Ristau; Mathias Mende
Advanced optical thin film design is the key to increase laser durability significantly: either by optimizing the electric field distribution within the coating, or by multi-index or rugate designs. Both ways may be even combined. The electric field distribution within a thin film stack was optimized to avoid peak intensities in critical layers using refractive index engineering and/or layer thickness grading. Femtosecond laser mirrors and dichroics for 780 nm and 390 nm were designed, realized and characterized. Here we present LIDT measurements of electric field optimized mirrors and dichroics, which are almost a factor of three higher compared to standard coating designs. At 780 nm a LIDT of 1.49 J/cm2 has been achieved and at 390 nm 0.58 J/cm2. With the exception of Al2O3, all investigated coating materials show a proportional dependence of the LIDT with electric field maximum, as expected by theory. For Al2O3 based systems the electrical field penetrates deep into the layer stack, a high number of interfaces are involved and interface effects probably limit the achievable LIDT. A similar effect was observed for rugate designs. To exclude such interface effects from the LIDT measurement, a special AR design was developed, which is practically equal for all high index materials. Here a LIDT above substrate damage threshold of 1.7 J/cm2 was achieved.
Proceedings of SPIE | 2014
D. Isfort; Diana Tonova; Michael Sundermann; Thomas Koch
The performance of optical components is usually improved by optical coatings. Some of these optical components exhibit complex geometrical shapes and are therefore very difficult to coat in a homogeneous way. The spectral performance of the optical coatings on such substrates will vary as a function of its geometry making it very difficult to keep the spectral performance within customer specifications all over the substrate. Examples for optics with complex geometries are half sphere lenses, freeform surfaces, diffraction gratings, microlense arrays, large substrates etc. We developed a simulation tool that can calculate and optimize the spectral performance of a given multilayer stack on arbitrarily shaped optics as a function of the processing parameters of the coating plant. This tool will obviously reduce the risk and the development costs. The spectral performance of a multilayer stack is given in general by the coating design, that means by the individual layer thicknesses and the refractive indices of the different layer materials. On curved optics different coating materials exhibit different thickness and refractive index distributions. Consequently the optical layer stack will exhibit varying spectral performance at different positions on the substrate. Empirical models for thickness and refractive index distributions have been developed as a function of the most important processing parameters (e.g., deposition rate, deposition angle, ion impingement rate and temperature).
Optical Interference Coatings (2013), paper TC.1 | 2013
Hans Becker; Diana Tonova; Michael Sundermann; Henrik Ehlers; Stefan Günster; Detlev Ristau
Gradient thin film stacks can be designed ab initio without any start- or index-profile approximations using Carl Zeiss in-house developed new design software. Discrete versus gradient-designs are discussed and first realized advanced multi-index-systems are presented.
Nanotechnology | 2010
Christoph Morhard; Claudia Pacholski; Dennis Lehr; Robert Brunner; Michael Helgert; Michael Sundermann; Joachim P. Spatz