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international conference on microelectronic test structures | 1989

Test structure for measurement of conductive film thickness

Maurice H. Hanes; Michael W. Cresswell; D.N. Schmidt; Richard J. Fiedor

A top-contact-resistor test structure, measurements made to validate its operation, and supporting analysis for VLSI process monitoring are described. The structure was devised to simulate the ability of a Van de Pauw test structure to provide reliable local values of the sheet resistance of a conducting film but in a plane perpendicular, rather than parallel, to the wafer surface. The objective was to provide access to film thickness through electrical measurements in a manner similar to that in which the sheet resistance measurements obtained from Van der Pauw structures make linewidth measurements possible when used in conjunction with a Kelvin resistor. Resistance measurements performed with this test structure permit calculation of film thickness and bulk resistivity.<<ETX>>


Archive | 1987

Transmit-receive means for phased-array active antenna system using rf redundancy

Harvey C. Nathanson; M.C. Driver; Michael W. Cresswell; Ronald G. Freitag; Donald K. Alexander; Daniel F. Yaw


Archive | 1994

Monolithic microwave integrated circuit on high resistivity silicon

Harvey C. Nathanson; Michael W. Cresswell; Thomas J. Smith; Lewis R. Lowry; Maurice H. Hanes


Archive | 1988

Thin film electroluminescent edge emitter structure on a silcon substrate

Zoltan K. Kun; Michael W. Cresswell; R.H. Hopkins


Archive | 1976

Low forward voltage drop thyristor

Michael W. Cresswell; John S. Roberts


Archive | 1973

Annealing to control gate sensitivity of gated semiconductor devices

Michael W. Cresswell; Richard J. Fiedor


Archive | 1973

Selective irradiation of junctioned semiconductor devices

Michael W. Cresswell; John S. Roberts


Archive | 1989

Process for producing vias in semiconductor

Harvey C. Nathanson; M.C. Driver; Michael W. Cresswell; Ronald G. Freitag; Donald K. Alexander; Daniel F. Yaw


Archive | 1980

Dynamic isolation of conductivity modulation states in integrated circuits

Michael W. Cresswell


Archive | 1989

Mitered mechanical switches

Harvey C. Nathanson; M.C. Driver; Michael W. Cresswell; Ronald G. Freitag; Donald K. Alexander; Daniel F. Yaw

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