Michiaki Endo
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Featured researches published by Michiaki Endo.
Applied Physics Letters | 1999
Michiaki Endo; Haruo Yoshida; Yasuhiro Maeda; Nobuo Miyamoto; Michio Niwano
An infrared (IR) monitoring system has been developed for the detection and characterization of hydrocarbon contamination on 300 mm (12 in.) Si wafer surfaces. IR propagates through the Si wafer, internally reflecting about 600 times, which enables us to detect a trace of organic contamination on the wafer surface. The present system allows for the detection of hydrocarbon contamination on 300 mm Si wafer surfaces with a contamination level of below 1011 carbon atoms/cm2.
Archive | 2000
Haruo Yoshida; Michiaki Endo
Archive | 2001
Michiaki Endo; Haruo Yoshida; Yasuhiro Maeda
Archive | 1999
Haruo Yoshida; Michiaki Endo; Michio Niwano; Nobuo Miyamoto; Yasuhiro Maeda
Archive | 2002
Michiaki Endo; Kazuyuki Maruo
Archive | 2004
Michiaki Endo; Kazuyuki Maruo
Ieej Transactions on Sensors and Micromachines | 2001
Fumikazu Takayanagi; Michiaki Endo; Kazuyuki Maruo; Haruo Yoshida; Michio Niwano
Archive | 1999
Haruo Yoshida; Michiaki Endo; Michio Niwano; Nobuo Miyamoto; Yasuhiro Maeda
Archive | 2002
Michiaki Endo; Kazuyuki Maruo
Archive | 1999
Michiaki Endo; Yasuhiro Maeda; Nobuo Miyamoto; Michio Niwano; Haruo Yoshida
