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Michihiro Sugo

Shin-Etsu Chemical

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Publication

Featured researches published by Michihiro Sugo.

Archive | 2012

Wafer processing laminate, wafer processing member, temporary bonding arrangement, and thin wafer manufacturing method

Hideto Kato; Michihiro Sugo; Shohei Tagami

Archive | 2013

WAFER PROCESS BODY, WAFER PROCESSING MEMBER, WAFER PROCESSING TEMPORARY ADHESIVE MATERIAL, AND METHOD FOR MANUFACTURING THIN WAFER

Shohei Tagami; Michihiro Sugo; Hiroyuki Yasuda; Masahiro Furuya; Hideto Kato

Archive | 2002

Electrode-forming compositions and electrode members

Michihiro Sugo; Hideto Kato

Archive | 2005

Photo-curable resin composition comprising a polyimide, a process for forming a pattern therewith, and a substrate protecting film

Hideto Kato; Michihiro Sugo; Tomoyuki Goto

Archive | 2013

Wafer processing laminate, wafer processing member, temporary adhering material for processing wafer, and manufacturing method of thin wafer

Michihiro Sugo; Hideto Kato; Shohei Tagami; Hiroyuki Yasuda; Masahito Tanabe

Archive | 2001

Polyimide silicone resin, process for its production, and polyimide silicone resin composition

Michihiro Sugo; Hideto Kato

Archive | 2011

ADHESIVE COMPOSITION, ADHESIVE SHEET, SEMICONDUCTOR APPARATUS PROTECTION MATERIAL, AND SEMICONDUCTOR APPARATUS

Kazunori Kondo; Michihiro Sugo; Hideto Kato

Archive | 1999

Radiation-curable resin compositions

Tetsuo Nakanishi; Michihiro Sugo

Archive | 2012

Temporary adhesive composition and method for manufacturing thin wafer using the same

Hiroyuki Yasuda; Masahiro Furuya; Michihiro Sugo; Shohei Tagami; Hideyoshi Yanagisawa

Archive | 2012

ORGANOPOLYSILOXANE, TEMPORARY ADHESIVE COMPOSITION CONTAINING ORGANOPOLYSILOXANE, AND METHOD OF PRODUCING THINNED WAFER USING THE SAME

Masahiro Furuya; Hiroyuki Yasuda; Shohei Tagami; Michihiro Sugo; Hideto Kato

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Collaboration

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Hideto Kato

Shin-Etsu Chemical

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Shohei Tagami

Shin-Etsu Chemical

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Hiroyuki Yasuda

Shin-Etsu Chemical

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Yoshinori Yoneda

Shin-Etsu Chemical

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Masahito Tanabe

Shin-Etsu Chemical

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Kazunori Kondo

Shin-Etsu Chemical

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Tomoyuki Goto

Shin-Etsu Chemical

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Masahiro Furuya

Shin-Etsu Chemical

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Akira Yamamoto

Shin-Etsu Chemical

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Satoshi Asai

Shin-Etsu Chemical

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