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Shohei Tagami

Shin-Etsu Chemical

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Publication

Featured researches published by Shohei Tagami.

Archive | 2012

Wafer processing laminate, wafer processing member, temporary bonding arrangement, and thin wafer manufacturing method

Hideto Kato; Michihiro Sugo; Shohei Tagami

Archive | 2012

Temporary adhesive composition, and method of producing thin wafer

Masahiro Furuya; Shohei Tagami; Hideto Kato; Hideyuki Ito; Masahiro Yoshizawa

Archive | 2013

WAFER PROCESS BODY, WAFER PROCESSING MEMBER, WAFER PROCESSING TEMPORARY ADHESIVE MATERIAL, AND METHOD FOR MANUFACTURING THIN WAFER

Shohei Tagami; Michihiro Sugo; Hiroyuki Yasuda; Masahiro Furuya; Hideto Kato

Archive | 2013

Wafer processing laminate, wafer processing member, temporary adhering material for processing wafer, and manufacturing method of thin wafer

Michihiro Sugo; Hideto Kato; Shohei Tagami; Hiroyuki Yasuda; Masahito Tanabe

Archive | 2016

Chemically amplified positive resist composition and pattern forming process

Hiroyuki Yasuda; Katsuya Takemura; Shohei Tagami

Archive | 2013

Wafer processing body, wafer processing member, wafer processing temporary adhesion material, and manufacturing method of thin wafer

Shohei Tagami; 昭平 田上; Michihiro Sugao; 道博 菅生; Hiroyuki Yasuda; 浩之 安田; Masahiro Furuya; 昌浩 古屋; Hideto Kato; 英人 加藤

Archive | 2013

Wafer processing body, wafer processing member, temporary adhering material for wafer processing, and method for manufacturing thin wafer

Michihiro Sugao; 道博 菅生; Hideto Kato; 英人 加藤; Shohei Tagami; 昭平 田上; Hiroyuki Yasuda; 浩之 安田; Masato Tanabe; 正人 田辺

Archive | 2012

Temporary adhesive composition and method for manufacturing thin wafer using the same

Hiroyuki Yasuda; Masahiro Furuya; Michihiro Sugo; Shohei Tagami; Hideyoshi Yanagisawa

Archive | 2012

ORGANOPOLYSILOXANE, TEMPORARY ADHESIVE COMPOSITION CONTAINING ORGANOPOLYSILOXANE, AND METHOD OF PRODUCING THINNED WAFER USING THE SAME

Masahiro Furuya; Hiroyuki Yasuda; Shohei Tagami; Michihiro Sugo; Hideto Kato

Archive | 2007

Polyimide silicone resin and thermosetting composition comprising the same

Michihiro Sugo; Hideto Kato; Tomoyuki Goto; Shohei Tagami

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Collaboration

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Michihiro Sugo

Shin-Etsu Chemical

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Hideto Kato

Shin-Etsu Chemical

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Hiroyuki Yasuda

Shin-Etsu Chemical

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Masahiro Furuya

Shin-Etsu Chemical

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Masahito Tanabe

Shin-Etsu Chemical

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Tomoyuki Goto

Shin-Etsu Chemical

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Takahiro Goi

Shin-Etsu Chemical

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Takanobu Takeda

Shin-Etsu Chemical

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Hideyoshi Yanagisawa

Shin-Etsu Chemical

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Hideyuki Ito

Shin-Etsu Chemical

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