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Michio Satou

Toshiba

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Publication

Featured researches published by Michio Satou.

Archive | 1991

Sputtering target and method of manufacturing the same

Michio Satou; Takasi Yamanobe; Mituo Kawai; Tooru Komatu; Hiromi Shizu; Noriaki Yagi

Archive | 1991

Highly purified metal material and sputtering target using the same

Takashi Ishigami; Minoru Obata; Mituo Kawai; Michio Satou; Takashi Yamanobe; Toshihiro Maki; Noriaki Yagi; Shigeru Ando

Archive | 1994

Ti-W sputtering target and method for manufacturing same

Takashi Yamanobe; Michio Satou; Takashi Ishigami; Minoru Obata; Mituo Kawai; Noriaki Yagi; Toshihiro Maki; Shigeru Ando

Archive | 1991

Sputtering target and production thereof

Michio Satou; Takasi Yamanobe; Mituo Kawai; Tooru Komatu; Hiromi Shizu; Noriaki Yagi

Archive | 1995

Sputtered silicide film

Michio Satou; Takasi Yamanobe; Mituo Kawai; Tooru Komatu; Hiromi Shizu; Noriaki Yagi

Archive | 1993

Verfahren zur Herstellung eines Zerstäubungstargets A process for producing a sputtering target

Michio Satou; Takashi Yamanobe; Takashi Ishigami; Mituo Kawai; Noriaki Yagi; Toshihiro Maki; Minoru Obata; Shigeru Ando

Archive | 1991

Hochreines Hafnium und dessen Verwendung als Sputtertarget High purity hafnium and its use as a sputtering target

Takashi Ishigami; Minoru Obata; Mituo Kawai; Michio Satou; Takashi Yamanobe; Toshihiro Maki; Noriaki Yagi; Shigeru Ando

Archive | 1991

Zerstäubungstarget und dessen herstellung Sputtering target and its manufacturing

Michio Satou; Takasi Yamanobe; Mituo Kawai; Tooru Komatu; Hiromi Shizu; Noriaki Yagi

Archive | 1991

Highly purified hafnium and sputtering target using the same

Shigeru Ando; Takashi Ishigami; Mituo Kawai; Toshihiro Maki; Minoru Obata; Michio Satou; Noriaki Yagi; Takashi Yamanobe

Archive | 1991

Cible de pulvérisation en titane de haute pureté

Shigeru Ando; Takashi Ishigami; Mituo Kawai; Toshihiro Maki; Minoru Obata; Michio Satou; Noriaki Yagi; Takashi Yamanobe

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Collaboration

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Mituo Kawai

Toshiba

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Noriaki Yagi

Toshiba

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Takashi Yamanobe

Toshiba

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Minoru Obata

Toshiba

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Shigeru Ando

Toshiba

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Takashi Ishigami

Toshiba

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Toshihiro Maki

Toshiba

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Hiromi Shizu

Toshiba

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Takasi Yamanobe

Toshiba

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Tooru Komatu

Toshiba

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