Michio Yamaji
Tokyo Electron
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Publication
Featured researches published by Michio Yamaji.
international symposium on semiconductor manufacturing | 2006
Takashi Orita; Michio Yamaji; Tsutomu Shinohara; Tomohiro Nakata; Masao Koizumi; Satoshi Hasaka; Hiroyuki Nakabayashi
Slow start safety cylinder valve (S3V) has been developed to inhibit adiabatic compression. S3V can control to increase the pressure slower than conventional pneumatic valve (PV) during the secondary pressure goes up, so that it can inhibit adiabatic compression and decomposition of oxidized gases. We have confirmed that S3V achieved lower temperature than PV by adiabatic compression theoretically and experimentally. Therefore, S3V is convenient to secure from accidents for oxidized gases in semiconductor fabs.
Archive | 1999
Ryousuke Dohi; Eiji Ideta; Nobukazu Ikeda; Satoshi Kagatsume; Kouji Nishino; Tadahiro Ohmi; Tomio Uno; Michio Yamaji; Kazuhiro Yoshikawa
Archive | 1999
Tadahiro Ohmi; Seiichi Iida; Satoshi Kagatsume; Jun Hirose; Kouji Nishino; Nobukazu Ikeda; Michio Yamaji; Ryousuke Dohi; Kazuhiro Yoshikawa; Mutsunori Koyomogi; Tomio Uno; Eiji Ideta; Takashi Hirose
Archive | 2000
Tadahiro Ohmi; Satoshi Kagatsume; Kazuhiko Sugiyama; Yukio Minami; Kouji Nishino; Ryousuke Dohi; Katsunori Yonehana; Nobukazu Ikeda; Michio Yamaji; Jun Hirose; Kazuo Fukazawa; Hiroshi Koizumi; Hideki Nagaoka; Akihiro Osaka-shi Morimoto; Tomio Uno; Eiji Ideta; Atsushi Matsumoto; Toyomi Uenoyama; Takashi Hirose
Archive | 2012
Shuji Moriya; Wataru Okase; Tsutomu Shinohara; Nobukazu Ikeda; Michio Yamaji; Yasutaka Hayashi; Toshihide Yoshida; Yasuyuki Omata
Archive | 2015
Norihiko Amikura; Satoshi Kagatsume; Masahiko Satoh; Yukio Naito; Satoshi Muto; Tomohiro Nakata; Tsutomu Shinohara; Michio Yamaji
Archive | 1993
Michio Yamaji; 道雄 山路
Archive | 2002
Tomohiro Nakata; Michio Yamaji
Archive | 2001
Hideki Fujimoto; Masakazu Fukui; Yuji Kawano; Yasujuki Nishi-ku Osaka-shi Omata; Naoyuki Sato; Shigeaki Tanaka; Noboru Uzawa; Michio Yamaji
Archive | 1998
Tetsuya Kojima; Hiroshi Nishi-ku Morokoshi; Tsutomu Shinohara; Michio Yamaji; Kosuke Yokoyama
