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Minami Hisataka

Hitachi

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Publication

Featured researches published by Minami Hisataka.

Archive | 2014

SLURRY, POLISHING LIQUID SET, POLISHING LIQUID, METHOD FOR POLISHING BASE, AND BASE

Minami Hisataka; Iwano Tomohiro; Igarashi Nobuyuki

Archive | 2017

Slurry, polishing fluid set, polishing fluid, method for polishing substrate and substrate

Iwano Tomohiro; Minami Hisataka; Akutsu Toshiaki; Fujisaki Koji

Archive | 2016

ABRASIVE, ABRASIVE SET, AND SUBSTRATE POLISHING METHOD

Yamamura Nao; Minami Hisataka; Akutsu Toshiaki; Iwano Tomohiro; Yamashita Tetsuro; Koizumi Masako

Archive | 2016

ABRASIVE AND SUBSTRATE POLISHING METHOD

Minami Hisataka; Iwano Tomohiro; Yamamura Nao; Akutsu Toshiaki; Yamashita Tetsuro; Koizumi Masako

Archive | 2016

POLISHER, POLISHER SET AND SUBSTRATE POLISHING METHOD

Iwano Tomohiro; Yamamura Nao; Minami Hisataka; Akutsu Toshiaki; Yamashita Tetsuro; Koizumi Masako

Archive | 2016

POLISHING LIQUID FOR CMP, AND POLISHING METHOD

Oota Munehiro; Takizawa Toshio; Minami Hisataka; Akutsu Toshiaki; Iwano Tomohiro

Archive | 2015

ABRASIVE, ABRASIVE SET AND SUBSTRATE ABRASION METHOD

Minami Hisataka; Akutsu Toshiaki; Iwano Tomohiro; Fujisaki Koji

Archive | 2015

Polishing solution for CMP and polishing method

Oota Munehiro; Takizawa Toshio; Minami Hisataka; Akutsu Toshiaki; Iwano Tomohiro

Archive | 2015

POLISHING MATERIAL, POLISHING MATERIAL SET, AND METHOD FOR POLISHING BASE MATERIAL

Minami Hisataka; Akutsu Toshiaki; Iwano Tomohiro; Fujisaki Koji

Archive | 2015

Slurry, polishing solution set, polishing solution, polishing method for substrate, and substrate

Minami Hisataka; Iwano Tomohiro; Arakawa Keita; Hidaka Takahiro

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Collaboration

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Iwano Tomohiro

Hitachi

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Akutsu Toshiaki

Hitachi

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Fujisaki Koji

Hitachi

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Oota Munehiro

Hitachi

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Takizawa Toshio

Hitachi

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