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Dive into the research topics where Minh Van Ngo is active.

Publication


Featured researches published by Minh Van Ngo.


Archive | 2004

UV-blocking etch stop layer for reducing UV-induced charging of charge storage layer in memory devices in BEOL processing

Ning Cheng; Clarence B. Ferguson; Emmanuil H. Lingunis; Minh Van Ngo; Joerg Reiss; Jean Y. Yang; Jeffrey A. Shields; Cyrus Tabery


Archive | 2003

Structure and method for preventing UV radiation damage in a memory cell and improving contact CD control

Angela Hui; Minh Van Ngo; Ning Cheng; Jaeyong Park; Jean Y. Yang; Hirokazu Tokuno; Kouros Ghandehari; Hidehiko Shiraiwa


Archive | 2003

Structure and method for preventing process-induced UV radiation damage in a memory cell

Angela Hui; Minh Van Ngo; Ning Cheng; Jaeyong Park; Jean Y. Yang; Kouros Ghandehari; Hirokazu Tokuno


Archive | 2005

Deposition of hard-mask with minimized hillocks and bubbles

Minh Van Ngo; Steven Avanzino; Hieu Pham; Robert A. Huertas


Archive | 2003

Protection of charge trapping dielectric flash memory devices from UV-induced charging in BEOL processing

Minh Van Ngo; Ning Cheng; Jeff P. Erhardt; Clarence B. Ferguson; Cyrus Tabery; John Caffall; Tyagamohan Gottipati; Dawn Hopper


Archive | 2008

Low-h plasma treatment with n2 anneal for electronic memory devices

Alexander H. Nickel; Allen Evans; Minh Tran; Lu You; Minh Van Ngo; Pei-Yuan Gao; William Brennan; Eric Wilson; Sung Jin Kim; Hieu Pham


Archive | 2005

Etch-back process for capping a polymer memory device

Minh Van Ngo; Angela T. Hui; Sergey D. Lopatin


Archive | 2005

Semiconductor memory with data retention liner

Minh Van Ngo; Arvind Halliyal; Tazrien Kamal; Hidehiko Shiraiwa; Rinji Sugino; Dawn Hopper; Pei-Yuan Gao


Archive | 2007

Process of forming an electronic device including depositing layers within openings

Robert J. San Jose Chiu; Connie Pin-chin Wang; Minh Van Ngo; Simon S. Chan


Archive | 2012

Method for forming a semiconducting layer with improved gap filling properties

Rinji Sugino; Yider Wu; Minh Van Ngo; Jeffrey Sinclair Glick; Kuo Tung Chang

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