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Minh Van Ngo

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Publication

Featured researches published by Minh Van Ngo.

Archive | 2004

UV-blocking etch stop layer for reducing UV-induced charging of charge storage layer in memory devices in BEOL processing

Ning Cheng; Clarence B. Ferguson; Emmanuil H. Lingunis; Minh Van Ngo; Joerg Reiss; Jean Y. Yang; Jeffrey A. Shields; Cyrus Tabery

Archive | 2003

Structure and method for preventing UV radiation damage in a memory cell and improving contact CD control

Angela Hui; Minh Van Ngo; Ning Cheng; Jaeyong Park; Jean Y. Yang; Hirokazu Tokuno; Kouros Ghandehari; Hidehiko Shiraiwa

Archive | 2003

Structure and method for preventing process-induced UV radiation damage in a memory cell

Angela Hui; Minh Van Ngo; Ning Cheng; Jaeyong Park; Jean Y. Yang; Kouros Ghandehari; Hirokazu Tokuno

Archive | 2005

Deposition of hard-mask with minimized hillocks and bubbles

Minh Van Ngo; Steven Avanzino; Hieu Pham; Robert A. Huertas

Archive | 2003

Protection of charge trapping dielectric flash memory devices from UV-induced charging in BEOL processing

Minh Van Ngo; Ning Cheng; Jeff P. Erhardt; Clarence B. Ferguson; Cyrus Tabery; John Caffall; Tyagamohan Gottipati; Dawn Hopper

Archive | 2008

Low-h plasma treatment with n2 anneal for electronic memory devices

Alexander H. Nickel; Allen Evans; Minh Tran; Lu You; Minh Van Ngo; Pei-Yuan Gao; William Brennan; Eric Wilson; Sung Jin Kim; Hieu Pham

Archive | 2005

Etch-back process for capping a polymer memory device

Minh Van Ngo; Angela T. Hui; Sergey D. Lopatin

Archive | 2005

Semiconductor memory with data retention liner

Minh Van Ngo; Arvind Halliyal; Tazrien Kamal; Hidehiko Shiraiwa; Rinji Sugino; Dawn Hopper; Pei-Yuan Gao

Archive | 2007

Process of forming an electronic device including depositing layers within openings

Robert J. San Jose Chiu; Connie Pin-chin Wang; Minh Van Ngo; Simon S. Chan

Archive | 2012

Method for forming a semiconducting layer with improved gap filling properties

Rinji Sugino; Yider Wu; Minh Van Ngo; Jeffrey Sinclair Glick; Kuo Tung Chang

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Ning Cheng

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Jean Y. Yang

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Hidehiko Shiraiwa

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Hirokazu Tokuno

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Angela Hui

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Angela T. Hui

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Clarence B. Ferguson

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Cyrus Tabery

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Dawn Hopper

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Hieu Pham

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