Publication


Featured researches published by Mirko Hattass.


Archive | 2013

HYBRID INTEGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF

Heribert Weber; Frank Fischer; Mirko Hattass; Yvonne Bergmann


Archive | 2013

HYBRID INTEGRATED COMPONENT

Johannes Classen; Axel Franke; Jens Frey; Heribert Weber; Frank Fischer; Patrick Wellner; Mirko Hattass; Daniel Christoph Meisel


Archive | 2011

MICROMECHANICAL COMPONENT HAVING A TEST STRUCTURE FOR DETERMINING THE LAYER THICKNESS OF A SPACER LAYER AND METHOD FOR MANUFACTURING SUCH A TEST STRUCTURE

Jochen Reinmuth; Ralf Boessendoerfer; Axel Franke; Mirko Hattass


Archive | 2010

Method for determining the sensitivity of an acceleration sensor or magnetic field sensor

Johannes Classen; Arnd Kaelberer; Hans-Joerg Faisst; Axel Franke; Mirko Hattass; Holger Rank; Robert Sattler; Alexander Buhmann; Ramona Maas; Marian Keck


Archive | 2013

HYBRIDLY INTEGRATED COMPONENT AND METHOD FOR THE PRODUCTION THEREOF

Johannes Classen; Heribert Weber; Mirko Hattass; Daniel Christoph Meisel


Archive | 2013

Drehratensensor und Verfahren zum Betrieb eines Drehratensensors

Robert Maul; Burkhard Kuhlmann; Mirko Hattass; Ralf Ameling; Benjamin Schmidt; Rolf Scheben; Thorsten Balslink


Archive | 2013

Micromechanical inertial sensor and method for manufacturing same

Johannes Classen; Mirko Hattass; Daniel Christoph Meisel


Archive | 2015

Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure

Friedjof Heuck; Ralf Reichenbach; Daniel Christoph Meisel; Lars Tebje; Mirko Hattass; Jochen Reinmuth; Torsten Kramer; Johannes Classen; Reinhard Neul; Antoine Puygranier


Archive | 2013

PRODUCTION PROCESS FOR A MICROMECHANICAL COMPONENT AND MICROMECHANICAL COMPONENT

Friedjof Heuck; Christoph Schelling; Mirko Hattass; Benjamin Schmidt


Archive | 2012

Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration

Reinhard Neul; Torsten Ohms; Mirko Hattass; Daniel Christoph Meisel

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