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Mitsuji Marumo

Canon Inc.

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Publication

Featured researches published by Mitsuji Marumo.

Archive | 1992

Wafer table and exposure apparatus with the same

Mitsuaki Amemiya; Eiji Sakamoto; Koji Uda; Kunitaka Ozawa; Kazunori Iwamoto; Shunichi Uzawa; Mitsuji Marumo

Archive | 1995

Substrate holding device and exposing apparatus using the same

Yuji Chiba; Nobutoshi Mizusawa; Kazunori Iwamoto; Yutaka Tanaka; Shinichi Hara; Mitsuji Marumo; Shin Matsui; Hiroshi Kurosawa

Archive | 1991

VACUUM ATTRACTION TYPE SUBSTRATE HOLDING DEVICE

Mitsuji Marumo

Archive | 1995

Substrate holding apparatus and a system using the same

Mitsuji Marumo

Archive | 2004

Semiconductor manufacturing method and apparatus

Mitsuji Marumo

Archive | 1995

Substrate conveying system

Mitsutoshi Kuno; Kazunori Iwamoto; Mitsuji Marumo

Archive | 2007

Mini-environment pod device, an exposure apparatus and a device manufacturing method using the same

Mitsuji Marumo

Archive | 1991

Plate to work under vacuum

Tetsuzo Mori; Mitsuji Marumo; Kazunori Iwamoto; Yuji Chiba; Kazuyuki Kasumi

Archive | 1991

Einrichtung zum Halten eines Substrats

Mitsuji Marumo; Kazunori Iwamoto; Nobutoshi Mizusawa; Takao Kariya; Shunichi Uzawa

Archive | 1991

Einrichtung zum Halten eines Substrats Means for holding a substrate

Mitsuji Marumo; Kazunori Iwamoto; Nobutoshi Mizusawa; Takao Kariya; Shunichi Uzawa

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Collaboration

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Kazunori Iwamoto

Canon Inc.

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Nobutoshi Mizusawa

Canon Inc.

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Shunichi Uzawa

Canon Inc.

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Yuji Chiba

Canon Inc.

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Eiji Sakamoto

Canon Inc.

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Kazuyuki Kasumi

Canon Inc.

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Shinichi Hara

Canon Inc.

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Takao Kariya

Canon Inc.

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Hiroshi Kurosawa

Canon Inc.

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Koji Uda

Canon Inc.

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