Mitsushi Itano
Daikin
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Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Mitsushi Itano.
Archive | 1998
Mitsushi Itano; Takehiko Kezuka
The fundamental interactions occurring between particles and the wafer surface in solutions are the van der Waals force (a molecular reciprocal action) and the electrostatic force (the reciprocal action of an electrical double layer). Research related to the particle adhesion mechanism on wafer surfaces in solutions that conform to the above two actions has thrived in recent years, and has done much to clarify the particle adhesion mechanism [1–12].
Archive | 2003
Mitsushi Itano; Takashi Kanemura; Hiroshi Yodogawa Seisakusho Momota; Daisuke Watanabe
Archive | 1996
Takehiko Kezuka; Makoto Suyama; Fumihiro Kamiya; Mitsushi Itano
Archive | 1992
Mitsushi Itano; Takehiko Kezuka; Motonobu Kubo; Shigeru Maruyama; 茂 丸山; 元伸 久保; 充司 板野; 健彦 毛塚
Archive | 2002
Mitsushi Itano; Takehiko Kezuka
Archive | 1999
Takehiko Kezuka; Makoto Suyama; Mitsushi Itano
Archive | 1996
Mitsushi Itano; Takehiko Kezuka; Makoto Suyama
Archive | 1994
Masao Ishii; Tomohiro Hosomi; Shigeru Maruyama; Mitsushi Itano
Archive | 2004
Shingo Nakamura; Shinichi Minami; Takashi Kanemura; Mitsushi Itano; Takehiko Kezuka; Fumihiro Kamiya
Microelectronic Engineering | 2009
Daisuke Watanabe; Hidemitsu Aoki; Mitsushi Itano; Takeshi Kezuka; Chiharu Kimura; Takashi Sugino
