Mitsuya Sato

Wafer handling apparatus and method

Wafer prober and a probe card to be used therewith

Alignment method in a wafer prober

Scanning type exposure apparatus and method and device manufacturing method

Method of and apparatus for controlling a fluid bearing

Scan type exposure apparatus and method having a reference plate with marks for image detection

Exposure apparatus and method, device manufacturing method, and discharge lamp

PLANAR MOTOR AND STAGE USING THE SAME

Light source, light source generation control method, exposure apparatus and maintenance method therefor, and semiconductor device manufacturing method and semiconductor production facility

POSITION DETECTOR AND EXPOSURE APPARATUS