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Takao Ukaji

Canon Inc.

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Publication

Featured researches published by Takao Ukaji.

Archive | 1988

Alignment method in a wafer prober

Nobuhito Yamaguchi; Mitsuya Sato; Takao Ukaji; Taro Ohmori; Eiichi Murakami

Archive | 2001

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD INCLUDING MEASURING POSITION AND/OR DISPLACEMENT OF EACH OF A BASE AND A STAGE WITH RESPECT TO A SUPPORT

Takao Ukaji

Archive | 2000

Stage apparatus, exposure apparatus, and device production method

Toshiya Asano; Takao Ukaji

Archive | 2005

Electromagnetic actuator having an armature coil surrounded by heat-conducting anisotropy material and exposure apparatus

Takao Ukaji

Journal of the Acoustical Society of America | 2012

Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method

Takashi Shibayama; Takehiko Mayama; Takao Ukaji

Archive | 1996

Substrate transfer system

Takao Ukaji; Yukio Yamane

Archive | 1988

Reject chip marking device and method of discriminating reject mark

Takao Ukaji

Archive | 2003

Electromagnetic actuator and exposure apparatus including the same

Takao Ukaji

Archive | 2004

Stage device and control method therefor, exposure apparatus, and device manufacturing method

Takao Ukaji

Archive | 2003

Stage equipment, its control method, aligner and device manufacturing method

Takao Ukaji; 隆夫 宇梶

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Collaboration

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Yukio Yamane

Canon Inc.

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Chidane Ouchi

Canon Inc.

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Eiichi Murakami

Canon Inc.

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Mitsuya Sato

Canon Inc.

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Nobuhito Yamaguchi

Canon Inc.

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Takashi Shibayama

Canon Inc.

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Takehiko Mayama

Canon Inc.

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Taro Ohmori

Canon Inc.

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Toshiya Asano

Canon Inc.

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Yuzo Seo

Canon Inc.

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