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Miyake Akira

Canon Inc.

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Publication

Featured researches published by Miyake Akira.

Archive | 2005

EVALUATION DEVICE FOR EVALUATION OF EXTREME ULTRA VIOLET LIGHT SOURCE, AND EVALUATION METHOD USING IT

Amamiya Mitsuaki; Miyake Akira

Archive | 1998

ELECTRON BEAM ALIGNER AND MASK FOR ELECTRON BEAM EXPOSURE

Terajima Shigeru; Muraki Masato; Matsui Shin; Miyake Akira; Okunuki Masahiko

Archive | 1993

REFLECTION TYPE MASK AND EXPOSURE DEVICE USING THE SAME

Miyake Akira; Watanabe Yutaka; Fukuda Yoshiaki

Archive | 1986

BEAM POSITION DETECTOR

Miyake Akira; Amamiya Mitsuaki; Watanabe Yutaka

Archive | 2004

CONSUMABLES MANAGING METHOD FOR EUV LIGHT SOURCE

Ogushi Nobuaki; Miyake Akira

Archive | 1992

MANUFACTURING OF X-RAY TAKING OUT WINDOW

Amamiya Mitsuaki; Miyake Akira

Archive | 2013

Drawing device and method of manufacturing article

Tanaka Ichiro; Nakayama Takahiro; Terajima Shigeru; Miyake Akira; Sano Kentaro

Archive | 1995

BEAM-POSITION DETECTION DEVICE AND SYSTEM USING THE DEVICE

Miyake Akira; Amamiya Mitsuaki

Archive | 1994

OPTICAL DEVICE SUCH AS EXPOSURE DEVICE AND PRODUCTION OF SEMICONDUCTOR DEVICE

Miyake Akira; Watanabe Yutaka

Archive | 1996

OPTICAL DEVICE AND EXPOSURE DEVICE HAVING THE SAME

Miyake Akira; Watanabe Yutaka

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Watanabe Yutaka

Canon Inc.

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Muraki Masato

Canon Inc.

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Matsui Shin

Canon Inc.

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Okunuki Masahiko

Canon Inc.

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Ogushi Nobuaki

Canon Inc.

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Terashima Shigeru

Canon Inc.

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