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Muraki Masato

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Publication

Featured researches published by Muraki Masato.

Archive | 2002

CHARGED PARTICLE BEAM ALIGNER, MANUFACTURING METHOD OF DEVICE, AND CHARGED PARTICLE BEAM APPLICATION DEVICE

Hashimoto Shinichi; Muraki Masato; Sohda Yasunari

Archive | 2004

CHARGED-PARTICLE BEAM EXPOSURE APPARATUS, AND CONTROL METHOD THEREOF

Muraki Masato; Kamimura Osamu; Takakuwa Maki

Archive | 2003

EXPOSURE SYSTEM, CONTROL METHOD THEREFOR, AND METHOD FOR MANUFACTURING DEVICE

Muraki Masato; Hashimoto Shinichi; Ota Hiroya

Archive | 2005

MULTI-CHARGED PARTICLE BEAM OPTICAL LITHOGRAPHY SYSTEM AND METHOD, AND METHOD FOR MANUFACTURING DEVICE EMPLOYING THE SYSTEM OR THE METHOD

Muraki Masato; Ota Hiroya; Nakayama Yoshinori; Yoda Haruo; Saito Norio

Archive | 2008

Charged particle beam drawing method, aligner, and process for fabricating device

Muraki Masato; Yoda Haruo

Archive | 2007

ELECTRON BEAM DEVICE AND METHOD FOR CREATING ELECTRON BEAM IRRADIATION PATTERN

Fujita Makoto; Yoda Haruo; Ando Masaaki; Inoue Yuji; Muraki Masato

Archive | 2006

METHOD FOR ADJUSTING ABERRATION, PROCESS FOR FABRICATING DEVICE, AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS

Muraki Masato; Ota Hiroya

Archive | 2005

METHOD AND DEVICE FOR CHARGED PARTICLE BEAM LITHOGRAPHY AND METHOD OF MANUFACTURING DEVICE

Muraki Masato; Ota Hiroya

Archive | 2004

DEFLECTOR, METHOD OF MANUFACTURING DEFLECTOR, AND CHARGED PARTICLE BEAM EXPOSURE DEVICE

Asano Koji; Hashimoto Shinichi; Tamamori Kenji; Iwasaki Yuichi; Muraki Masato; Nakayama Yoshinori; Esashi Masaki

Archive | 2013

LITHOGRAPHY DEVICE, LITHOGRAPHY METHOD, AND MANUFACTURING METHOD OF ARTICLE

Muraki Masato; Morita Tomoyuki

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Yoda Haruo

Hitachi

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