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Miyazawa Kenichi

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Publication

Featured researches published by Miyazawa Kenichi.

Archive | 1995

CHARGED PARTICLE BEAM EXPOSING METHOD AND DEVICE THEREOF

Miyazawa Kenichi; Arai Soichiro; Kai Junichi; Yasuda Hiroshi

Archive | 1997

MULTIPLE CHARGED PARTICLE BEAM EXPOSURE METHOD AND ITS DEVICE

Sato Takamasa; Arai Soichiro; Miyazawa Kenichi; Daikyo Yoshihisa; Kai Junichi; Yasuda Hiroshi

Archive | 2004

ELECTRON BEAM EXPOSURE SYSTEM AND ITS OPERATING METHOD

Seto Isamu; Miyazawa Kenichi; Yasuda Hiroshi; Arai Soichiro; Yahara Hidefumi

Archive | 1997

CHARGED PARTICLE BEAM EXPOSURE SYSTEM AND ITS DATA PROCESSING METHOD

Takahashi Yasushi; Arai Soichiro; Miyazawa Kenichi; Kai Junichi; Yasuda Hiroshi

Archive | 1996

ELECTRONIC-BEAM EXPOSURE SYSTEM AND OPERATION THEREOF

Abe Tomohiko; Takemoto Akio; Miyazawa Kenichi; Seto Isamu; Arai Soichiro; Yahara Hidefumi; Yasuda Hiroshi

Archive | 1994

CHARGED-PARTICLE BEAM LITHOGRAPHY DEVICE AND PATTERN LITHOGRAPHY METHOD BY CHARGED-PARTICLE BEAM

Taki Kazutaka; Yasuda Hiroshi; Kai Junichi; Nakano Mitsuhiro; Miyazawa Kenichi

Archive | 1996

BIT MAP DEVELOPING METHOD AND DEVICE OF GRAPHIC DATA FOR CHARGED PARTICLE BEAM EXPOSURE DEVICE

Arai Soichiro; Miyazawa Kenichi; Nasuno Hideki; Kai Junichi; Yasuda Hiroshi

Archive | 1996

METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM

Miyazawa Kenichi; Arai Soichiro; Yahara Hidefumi; Yasuda Hiroshi; Kai Junichi

Archive | 1991

Arbitrary angle pattern generating method in charged particle beam exposing method

Kai Junichi; Yasuda Hiroshi; Taki Kazutaka; Miyazawa Kenichi

Archive | 2002

Verfahren und System zur Belichtung mittels eines Strahls geladener Teilchen

Arai Soichiro; Miyazawa Kenichi; Yabara Hidefumi; Yasuda Hiroshi; Nakatani Takayuki

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Yasuda Hiroshi

Fujitsu

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Kai Junichi

Fujitsu

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Sato Takamasa

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Abe Tomohiko

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Takahashi Yasushi

Fujitsu

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