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Kai Junichi

Fujitsu

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Publication

Featured researches published by Kai Junichi.

Archive | 1991

ELECTRON BEAM ALIGNER AND ALIGNING METHOD

Sato Takamasa; Yasuda Hiroshi; Yamada Akio; Kai Junichi; Daikyo Yoshihisa; Yamada Keiji; Oshima Toru

Archive | 1995

CHARGED PARTICLE BEAM EXPOSING METHOD AND DEVICE THEREOF

Miyazawa Kenichi; Arai Soichiro; Kai Junichi; Yasuda Hiroshi

Archive | 1998

CHARGED PARTICLE BEAM EXPOSURE METHOD AND DEVICE THEREFOR

Arai Soichiro; Sato Takamasa; Daikyo Yoshihisa; Kai Junichi; Yasuda Hiroshi

Archive | 1997

MULTIPLE CHARGED PARTICLE BEAM EXPOSURE METHOD AND ITS DEVICE

Sato Takamasa; Arai Soichiro; Miyazawa Kenichi; Daikyo Yoshihisa; Kai Junichi; Yasuda Hiroshi

Archive | 1992

CHARGED PARTICLE BEAM ALIGNER AND CHARGED PARTICLE BEAM EXPOSURE METHOD

Kai Junichi; Yasuda Hiroshi; Watanabe Yoshio

Archive | 1990

WAFER HOLDER FOR ELECTRON BEAM EXPOSURE DEVICE

Taki Kazutaka; Yasuda Hiroshi; Kai Junichi

Archive | 1995

METHOD AND SYSTEM FOR EXPOSURE WITH CHARGED PARTICLE BEAM

Arai Soichiro; Kai Junichi; Yasuda Hiroshi; Fueki Shunsuke; Daikyo Yoshihisa

Archive | 1992

METHOD AND APPARATUS FOR CONTROL OF CHARGED PARTICLE BEAM IN CHARGED PARTICLE BEAM ALIGNER

Kai Junichi; Yasuda Hiroshi; Taki Kazutaka

Archive | 1989

METHOD AND APPARATUS FOR ELECTRON BEAM LITHOGRAPHY

Kai Junichi; Yasuda Hiroshi

Archive | 1997

CHARGED PARTICLE BEAM EXPOSURE SYSTEM AND ITS DATA PROCESSING METHOD

Takahashi Yasushi; Arai Soichiro; Miyazawa Kenichi; Kai Junichi; Yasuda Hiroshi

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Yasuda Hiroshi

Fujitsu

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Miyazawa Kenichi

Advantest

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Takahashi Yasushi

Fujitsu

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Sato Takamasa

Advantest

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Sakamoto Kiichi

Fujitsu

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Yamada Akio

Fujitsu

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Kataoka Toyotaka

Fujitsu

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Miyaki Shinji

Fujitsu

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