Monika Pilz

A new inorganic-organic polymer for the passivation of thin film capacitors

Inorganic-organic polymers with barrier properties against water vapor, excellent electrical data (ε≤3, 2, RD>1016 Ωcm, ED up to 400 V/µm) and good adhesion to various substrate materials have been developed. Tailored modifications of these materials provide an excellent protective coating for thin film capacitors. Several mm thick, expensive, encapsulations could be replaced by thin coatings (up to 10 µm). The polymer coating allows the use of thin film chip capacitors in surface-mount technology. As a measure for the efficiency of the coating, the capacitance decrease under controlled humidity has been used. The influence of the material composition, the type of catalyst during sol-gel processing and the curing conditions have been studied. Adhesion and water vapor permeation properties of the polymers and rheological properties of the coating solutions have been investigated. A protective coating is developed, which increases the withstandness of capacitors against humid conditions (90°C, 100% rel. humidity) by a factor of about 30 (compared to uncoated capacitors) and shows no crack formation during thermal cycling.

New Patternable Materials for Electronic Packaging

New inorganic-organic copolymers (ORMOCERs – ORganically MOdified CERamics) were developed as protective coatings for electronic and optical devices, as patternable insulation and passivation layers for electronics, e. g. MCMs, and as possible interconnects and waveguides for micro optics. Depending on the chemical composition and the processing parameters, their important features are low permittivity constants (eR ≤ 3.2), high bulk resistance (R D > 10 16 Ωcm), high dielectric strength (E D ≤ 400 V/μm), refractive index around 1.48, optical transparency in the range of 400 – 1300 nm, and good adhesion to numerous substrates, such as Al 2 O 3 , glass, silicon, copper, aluminum, steel, polyimides, polyesters and epoxides. The materials can be applied using standard technology. They are patterned by laser direct writing, photolithographic, screen printing or embossing technologies.

PATTERNABLE INORGANIC-ORGANIC COPOLYMERS (ORMOCERS)

Abstract Inorganic-organic copolymers (ORMOCERs - ORganically MOdified CERamics), synthesized by sol-gel processing, were developed for interconnection technologies and integrated optics. These optical transparent materials with excellent dielectric properties are patternable by standard technologies and, additionally, by laser direct writing.