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Moriaki Akazawa

Mitsubishi

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Publication

Featured researches published by Moriaki Akazawa.

Archive | 1991

Method of treating semiconductor substrate surface and method of manufacturing semiconductor device including such treating method

Toshiaki Ogawa; Hiroshi Morita; Tomoaki Ishida; Kenji Kawai; Moriaki Akazawa

Archive | 1988

Semiconductor wafer treating device utilizing a plasma

Nobuo Fujiwara; Kenji Kawai; Moriaki Akazawa; Teruo Shibano; Tomoaki Ishida; Kyusaku Nishioka

Archive | 1993

Manufacturing method of a semiconductor device with a trench capacitor

Moriaki Akazawa

Archive | 1992

Method for cleaning semiconductor devices

Tomoaki Ishida; Kenji Kawai; Moriaki Akazawa; Takahiro Maruyama; Toshiaki Ogawa

Archive | 1991

Plasma etching method with enhanced anisotropic property and apparatus thereof

Kenji Kawai; Moriaki Akazawa; Takahiro Maruyama; Toshiaki Ogawa; Hiroshi Morita

Archive | 1991

Semiconductor memory with laminated layers - which consist of insulating layers with sandwiched conductive layer on semiconductor substrate

Moriaki Akazawa

Archive | 2002

Semiconductor device with capacitor and method of manufacturing thereof

Katsunobu Hori; Takeshi Matsunuma; Kenichiro Shiozawa; Moriaki Akazawa

Archive | 1990

Plasma processing apparatus including an electromagnet with a bird cage core

Moriaki Akazawa; Takahiro Maruyama; Toshiaki Ogawa; Hiroshi Morita; Tomoaki Ishida

Archive | 1991

Cleaning semiconductors during mfr. - applying reactive gas and using plasma produced in vessel processing substrate

Tomoaki Ishida; Kenji Kawai; Moriaki Akazawa; Takahiro Maruyama; Toshiaki Ogawa

Archive | 1993

Mfg. semiconductor component with first film on substrate - includes forming etching mask with aperture on films, leaving part of film free

Yoshinori Tanaka; Mitsuya Kinoshita; Shinya Watanabe; Tatsuo Kasaoka; Moriaki Akazawa; Toshiaki Ogawa

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Tomoaki Ishida

Mitsubishi

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Toshiaki Ogawa

Mitsubishi

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Kenji Kawai

Renesas Electronics

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Hiroshi Morita

Mitsubishi

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Takahiro Maruyama

Mitsubishi

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Kyusaku Nishioka

Mitsubishi Electric

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Nobuo Fujiwara

Mitsubishi Electric

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Teruo Shibano

Mitsubishi Electric

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Katsunobu Hori

Mitsubishi

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Kenichiro Shiozawa

Mitsubishi

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