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Tomoaki Ishida

Mitsubishi

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Publication

Featured researches published by Tomoaki Ishida.

Archive | 1991

Method of treating semiconductor substrate surface and method of manufacturing semiconductor device including such treating method

Toshiaki Ogawa; Hiroshi Morita; Tomoaki Ishida; Kenji Kawai; Moriaki Akazawa

Archive | 1992

Dry etching method of copper or copper alloy interconnection layer employing plasma of an iodine compound

Tomoaki Ishida

Archive | 1988

Semiconductor wafer treating device utilizing a plasma

Nobuo Fujiwara; Kenji Kawai; Moriaki Akazawa; Teruo Shibano; Tomoaki Ishida; Kyusaku Nishioka

Archive | 1992

Method for cleaning semiconductor devices

Tomoaki Ishida; Kenji Kawai; Moriaki Akazawa; Takahiro Maruyama; Toshiaki Ogawa

Japanese Journal of Applied Physics | 1992

Mechanism for AlSiCu Alloy Corrosion

Tomoaki Ishida; Nobuo Fujiwara; Masahiro Yoneda; Kazuo Nakamoto; Kazuo Horie

Archive | 1990

METHOD OF CLEANING A SURFACE

Takahiro Maruyama; Toshiaki Ogawa; Hiroshi Morita; Tomoaki Ishida; Kenji Kawai

Archive | 1990

Plasma processing apparatus including an electromagnet with a bird cage core

Moriaki Akazawa; Takahiro Maruyama; Toshiaki Ogawa; Hiroshi Morita; Tomoaki Ishida

Archive | 1991

Cleaning semiconductors during mfr. - applying reactive gas and using plasma produced in vessel processing substrate

Tomoaki Ishida; Kenji Kawai; Moriaki Akazawa; Takahiro Maruyama; Toshiaki Ogawa

Archive | 1997

Method of measuring a semiconductor device and a method of making a semiconductor device

Tomoaki Ishida; Ryo Obara

Archive | 1991

Semiconductor substrate surface cleaning - by plasma etching using fluorine-contg. gas, renewed etching using fluorine-contg. gas and UV-irradiation at reduced pressure

Toshiaki Ogawa; Hiroshi Morita; Tomoaki Ishida; Kenji Kawai; Moriaki Akazawa

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Kenji Kawai

Renesas Electronics

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Moriaki Akazawa

Mitsubishi

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Toshiaki Ogawa

Mitsubishi

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Hiroshi Morita

Mitsubishi

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Takahiro Maruyama

Mitsubishi

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Nobuo Fujiwara

Mitsubishi Electric

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Kyusaku Nishioka

Mitsubishi Electric

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Teruo Shibano

Mitsubishi Electric

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Masahiro Yoneda

Mitsubishi Electric

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Ryo Obara

Mitsubishi

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