Mototaka Arakawa

Accurate measurements of the acoustical physical constants of LiNbO/sub 3/ and LiTaO/sub 3/ single crystals

The acoustical physical constants (elastic constant, piezoelectric constant, dielectric constant, and density) of commercial surface acoustic wave (SAW)-grade LiNbO/sub 3/ and LiTaO/sub 3/ single crystals were determined by measuring the bulk acoustic wave velocities, dielectric constants, and densities of many plate specimens prepared from the ingots. The maximum probable error in each constant was examined by considering the dependence of each constant on the measured acoustic velocities. By comparing the measured values of longitudinal velocities that were not used to determine the constants with the calculated values using the previously mentioned constants, we found that the differences between the measured and calculated values were 1 m/s or less for both LiNbO/sub 3/ and LiTaO/sub 3/ crystals. These results suggest that the acoustical physical constants determined in this paper can give the values of bulk acoustic wave velocities with four significant digits.

Development of the line-focus-beam ultrasonic material characterization system

A line-focus-beam ultrasonic material characterization (LFB-UMC) system has been developed to evaluate large diameter crystals and wafers currently used in electronic devices. The system enables highly accurate detection of slight changes in the physical and chemical properties in and among specimens. Material characterization proceeds by measuring the propagation characteristics, viz., phase velocity and attenuation, of Rayleigh-type leaky surface acoustic waves (LSAWs) excited on the water-loaded specimen surface. The measurement accuracy depends mainly upon the translation accuracy of the mechanical stages used in the system and the stability of the temperature environment. New precision mechanical translation stages have been developed, and the mechanical system, including the ultrasonic device and the specimen, has been installed in a temperature-controlled chamber to reduce thermal convection and conduction at the specimen. A method for precisely measuring temperature and longitudinal velocity in the water couplant has been developed, and a measurement procedure for precisely measuring the LSAW velocities has been completed, achieving greater relative accuracy to better than /spl plusmn/0.002% at any single chosen point and /spl plusmn/0.004% for two-dimensional measurements over a scanning area of a 200-mm diameter silicon single-crystal substrate. The system was developed to address various problems arising in science and industry associated with the development of materials and device fabrication processes.

A method for calibrating the line-focus-beam acoustic microscopy system

Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with high accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.

Piezoelectric Properties of Ca3NbGa3Si2O14 Single Crystal

Langasite-type single crystal Ca3NbGa3Si2O14 (CNGS) was grown by the Czochralski technique. Dielectric, elastic and piezoelectric constants of CNGS were measured by the resonance-antiresonance method. At room temperature, dielectric constants e11T/e0 and e33T/e0 were 17.8 and 27.9, respectively. Electromechanical coupling coefficients k12, k25 and k26 were also determined as 10.9, 17.3 and 11.9%, respectively. The measurements were carried out in a temperature range from -30 to 80°C. Temperature coefficients of the dielectric, elastic and piezoelectric constants were obtained. The line-focus-beam and plane-wave ultrasonic material characterization system was employed for measuring bulk acoustic velocities, and longitudinal and transverse wave velocities of 7408.4 m/s and 3136.2 m/s, respectively, in the c-direction uncoupled with piezoelectricity at 23°C were obtained. This was in good agreement with the results determined by the resonance-antiresonance method. The density of CNGS was 4125 kg/m3. All the parameters of the CNGS crystal for bulk and surface acoustic wave applications were determined in this research.

Diffraction effects on bulk-wave ultrasonic velocity and attenuation measurements

The loss and phase advance due to diffraction are experimentally observed by measuring the amplitude and phase of radio frequency (rf) tone burst signals in the VHF range, in an ultrasonic transmission line consisting of a buffer rod with an ultrasonic transducer on one end, a couplant of water, and a solid specimen of synthetic silica glass. The measured results agree well with the calculated results from the exact integral expression of diffraction. The diffraction effects on the velocity and attenuation measured in this frequency range and their corrections are investigated to realize more accurate measurements. It is shown that attenuation measurements are influenced by diffraction losses and can be corrected by numerical calculations, and that velocity measurements are affected by the phase advance caused by diffraction. This investigation demonstrates that, in complex-mode velocity measurements, in which the velocity is determined from the measured phase of the signals, the true velocity at each frequency can be obtained by correction using the numerical calculation of diffraction. Based on this result, a new correction method in amplitude-mode velocity measurements is also proposed. In this new method, the velocity is determined from the intervals of interference output obtained by sweeping the ultrasonic frequency for the superposed signals generated by the double-pulse method. Velocity may be measured accurately at frequencies in the Fresnel region, and diffraction correction is essential to obtain highly accurate values with five significant figures or more.

High-accuracy standard specimens for the line-focus-beam ultrasonic material characterization system

We prepared standard specimens for the line-focus-beam ultrasonic material characterization system to obtain absolute values of the propagation characteristics (phase velocity and attenuation) of leaky surface acoustic waves (LSAWs). The characterization system is very useful for evaluating and analyzing specimen surfaces. The calibration accuracy of these acoustic parameters depends on the accuracy of acoustical physical constants (elastic constants, piezoelectric constants, dielectric constants, and density) determined for standard specimens. In this paper, we developed substrates of non piezoelectric single crystals (viz., gadolinium gallium garnet [GGG], Si, and Ge) and an isotropic solid (synthetic silica [SiO/sub 2/] glass) as standard specimens. These specimens can cover the phase velocity range of 2600 to 5100 m/s for Rayleigh-type LSAWs. To determine the elastic constants with high accuracy, we measured velocities by the complex-mode measurement method and corrected diffraction effects. Measurements of bulk acoustic properties (bulk wave velocity and density) were conducted around 23/spl deg/C, and bulk wave velocities were obtained with an accuracy of within /spl plusmn/0.004%. We clearly detected differences in acoustic properties by comparing the obtained results with the previously published values; the differences were considered to be due to differences of the specimens used. We also detected differences in acoustic properties among four SiO/sub 2/ substrates produced by different manufacturers.

Ultrasonic Microspectroscopy Characterization of AlN Single Crystals

Basic acoustic properties of AlN single crystal Y-cut and Z-cut plates, grown by the physical vapor transport method, were evaluated using ultrasonic microspectroscopy (UMS) technology. A method of determining the acoustical physical constants with two specimens was developed by measuring the velocities of longitudinal and shear waves and leaky surface acoustic waves (LSAWs). We obtained accurate bulk-wave velocities, LSAW velocities and their distributions in the specimen surfaces, and the density with great differences compared with the calculated ones using the reported constants. We also determined the corresponding constants. This UMS technology will contribute to the further development of AlN crystals.

A super-precise CTE evaluation method for ultra-low-expansion glasses using the LFB ultrasonic material characterization system

A super-precise method of evaluating the coefficient of thermal expansion (CTE) of ultra-low-expansion glasses for future extreme ultra-violet lithography (EUVL) systems was developed using the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Evaluation was demonstrated for two commercial glasses, TiO2-SiO2 glass (C-7971) and Li2O-Al2O3-SiO2 glass ceramic (Zerodur). For the C-7971 specimens, the sensitivity and resolution in the velocity measurement of leaky surface acoustic waves (LSAWs) for the CTE were estimated to be 4.40 (ppb/K)/(m/s) and ±0.77 ppb/K for ±2σ (σ: standard deviation). LSAW velocity differences caused by different TiO2 concentrations and distributions or striae in each specimen were successfully detected and evaluated. For the Zerodur specimens, LSAW velocity differences associated with the chemical compositions and crystallization conditions were observed among different ingots and specimens. This ultrasonic method is expected to be an extremely useful and effective CTE evaluation technology and to contribute to improving and developing EUVL-grade glass materials.

Influence of reflected waves from the back surface of thin solid-plate specimen on velocity measurements by line-focus-beam acoustic microscopy

We investigated the velocity measurements of leaky surface acoustic waves (LSAW) by line-focus-beam (LFB) acoustic microscopy of thin specimens for which the waves reflected from the back surface of the specimen (back reflection) must be included in the measurement model. The influence of back reflection resulted in a serious problem in measurement accuracy of the apparent changes of measured velocities. Using several samples of thin synthetic silica glasses, the determination of LSAW velocity affected by the reflected waves and the relationship between the specimen thickness and the apparent velocity change with a periodic frequency interval in the frequency dependence of measured LSAW velocities are discussed in detail. Three useful methods for eliminating that influence are proposed and demonstrated: first, separating the radio frequency (RF) pulsed wave signal from the specimen surface and the pulses reflected from the back surface by reducing the RF pulse width; second, scattering acoustic waves from the roughened back surface; and third, taking the moving average of measured frequency characteristics of LSAW velocities. It is shown that, among these methods, the moving average method is the most useful and effective as a general means to eliminate the influence and to determine intrinsic velocity values because this method needs no specimen process and no system change, and the same conventional V(z) curve measurement and analysis can be employed.

Improvement of Velocity Measurement Accuracy of Leaky Surface Acoustic Waves for Materials with Highly Attenuated Waveform of the V(z) curve by the Line-Focus-Beam Ultrasonic Material Characterization System

Measurement accuracies of leaky surface acoustic wave (LSAW) velocities for materials with highly attenuated waveforms of V(z) curves obtained by the line-focus-beam ultrasonic material characterization (LFB-UMC) system are investigated. Theoretical investigations were carried out and experiments were performed for TiO2–SiO2 glass (C-7972), Li2O–Al2O3–SiO2 glass ceramic (Zerodur®), and (111) gadolinium gallium garnet (GGG) single crystal as specimens. Waveform attenuations of V(z) curves for C-7972 and Zerodur® are greater than those for the (111) GGG single crystal. Frequency dependences of the waveform attenuations were calculated for each specimen by considering the propagation attenuation of LSAWs. The theoretical results revealed that the waveform attenuation dominantly depends upon the acoustic energy loss due to the water loading effect on the specimen surface, and that the waveform attenuation becomes smaller with decreasing frequency. Significant improvement of the measurement precision of LSAW velocities was demonstrated for each specimen using three LFB ultrasonic devices with different curvature radii R of the cylindrical acoustic lenses: R=2.0 mm at 75 MHz, R=1.5 mm at 110 MHz, and R=1.0 mm at 225 MHz; for C-7972, the precisions were improved from ±0.0053% at 225 MHz to ±0.0020% at 75 MHz.